MC-10 Series: Mass flow controller contributes cost of ownership by quick delivery

• Elastomer seal

• Fast-acting solenoid actuator incorporated

• Available between 10SCCM and 150SLM by 11 types

• Option on the possible additional, RS-485 digital interface and VR function

• By using metal case and various filters, stable operation can achieved through reduction of radio frequency noises and electromagnetic field interference

• Download the specification of MC-10 series

MC-1000L Series: Low cost of MFC ownership possible with elastomer seal attached

• Elastomer seal

• Fast-acting solenoid actuator incorporated

• By using metal case and various filters, stable operation can be acheived through reduction of radio frequency noises and electromagnetic field interferences

• Download the specification of MC-1000 series

• High accuracy ±1.0%S.P.

• RS-485 digital interface

• LINTEC’s original ambient temperature-compensated sensor incorporated

• High-speed and high performance piezoelectric actuator

• Long-term leak tightness ensured using metal seal

• By using metal case and various filters, stable operation can be acheived through reduction of radio frequency noises and electromagnetic field interferences

• Download the specification of MC-3000L series

MC-3000L-TC Series: Mass flow controller with maximum operating temperature up to 120℃

• Maximum operating temperature of 120℃

• RS-485 digital interface

• LINTEC’s original ambient temperature-compensated sensor incorporated

• Highly functional upon installation of microprocessor

• Diaphragm valve with small dead volume

• High-speed and high performance piezoelectric actuator

• By using metal case and various filters, stable operation can be acheived through reduction of radio frequency noises and electromagnetic field interferences

• Download the specification of MC-3000L-TC series

MC-3000S Series: Mass flow controller equipped with LINTEC’s original low pressure differential device to operate at low differential pressure environment

• Low pressure differential device

• RS-485 digital interface

• LINTEC’s original ambient temperature-compensated sensor incorporate

• Diaphragm valve with small dead volume

• High-speed and high performance piezoelectric actuator

• By using metal case and various filters, stable operation can be acheived through reduction of radio frequency

• Download the specification of MC-3000S series

• EtherCAT digital interface in accordance with SEMI E54.20-1108
• LINTEC’s own ambient temperature-compensated sensor incorporated
• Highly functional upon installation of microprocessor
• Diaphragm valve with small dead volume
• High-speed and high efficiency piezoelectric actuator
• Download the specification of MC-5000C series

• Widely-used sensor-actuator Networks DeviceNetTM(ODVA) interface

• Top or side communication connectors installation available for selection

• LINTEC’s original ambient temperature-compensated sensor incorporated

• Highly functional upon installation of microprocessor

• Diaphragm valve with small dead volume

• High-speed and high performance piezoelectric actuator

• Download the specification of MC-5000L series

MM-3000L Series: Previous MC-3000L Series-based, highly efficient digital mass flow meter

• RS-485 digital interface

• LINTEC’s original ambient temperature compensated sensor incorporated

• Highly functional upon installation of microprocessor

• Long-term leak tightness ensured using metal seal

• By using metal case and various filters, stable operation can be achieved through reduction of radio frequency noises and electromagnetic field interferences

• Download the specification MM-3000L series

MM-3000L-TN Series: Guaranteed operation up to120℃ in high-temperature environment

• Maximum operating temperature of 120℃

• RS-485 digital interface

• LINTEC’s original ambient temperature compensated sensor incorporated

• Highly functional upon installation of microprocessor

• Long-term leak tightness ensured using metal seal

• By using metal case and various filters, stable operation can be acheived through reduction of radio frequency noises and electromagnetic field interferences

• Download the specification of MC-3000L-TN series

LC-3102L-NO: Highly-efficient digital mass flow controller with　piezoelectric actuator incorporated within mass flow sensor for liquid applications

• Operates as a liquid mass flow controller upon installation of piezoelectric actuator

• RS-485 digital interface

• LINTEC’s original ambient temperature-compensated sensor incorporated

• Highly functional upon installation of microprocessor

• High-speed and high efficiency piezoelectric actuator

• Download the specification of LC-3000L series

LM-3000L Series: High performance digital mass flow meter equipped with mass flow meter for liquid applications

• Operates as a liquid mass flow controller when use in combination with CV-1000 Series or control valve-fitted VU Series

• Can also be used as a liquid mass flow controller upon integration of a solenoid-actuator driving circuit

• RS-485 digital interface

• Lintec’s original ambient temperature-compensated sensor incorporated

• Highly functional upon installation of microprocessor

• Download the specification of LM-3000L series

AM-3102: Liquid mass flow meter equipped with metallic part-excluded wetted materials

• Exclusion of metallic parts from the wetted materials makes strong acid handling possible

• RS-485 digital interface

• LINTEC’s original ambient temperature-compensated sensor incorporated

• Highly functional upon installation of microprocessor

• Download the specification of AM-3000

VU-206 Series: Piezoelectric actuator-equipped liquid vaporizer unit

• Efficient liquid vaporization control when used in combination with LM-2000P or LM-3000L Series

• Vaporization of the precisely-controlled liquid using piezoelectric actuator

• Maximum operating temperature up to 160℃

• Compact size

• Long-term leak tightness ensured using metal seal

• Download the specification of VU-206

VU-430A Series: Solenoid actuator equipped compact vaporizer unit

• Efficient liquid vaporization control when used in combination with LM-3000L Series

• High precision liquid vaporization control using solenoid actuator

• Compact design

• With maximum operating temperature up to 200℃, this apparatus is most suitable for the use of liquid with low vapor pressure and low flow rate, such as low-k, high-k materials, and various metals

• Rapid vaporization of the liquid sprayed upon the use of double orifice nozzle within vaporization chamber by radiant heating

• Download the specification of VU-430A

VU-450 Series: Solenoid actuator equipped compact vaporizer unit

• Efficient liquid vaporization control when used in combination with LM-3000L Series

• High precision liquid vaporization system control using solenoid actuator

• Vaporizing the multiple liquid materials conccurently when use in combination with liquid mass flow meters

• This apparatus is most suitable for the use of liquid with low vapor pressure and low flow rate, such as low-k, high-k materials, and various metals

• Rapid vaporization of the liquid sprayed upon the use of double orifice nozzle within vaporization chamber by radiant heating

• Download the specification of VU-450 series

VU-900 Series: Vaporizer providing stable vaporization of liquid source by preventing heat deterioration through reducing possibility of direct contact of liquid with vaporization chamber

• High precision liquid vaporization system control using solenoid actuator

• Most suitable for thermally unstable materials such as low-k, high-k, and various metals

• Rapid vaporization of the liquid sprayed upon the use of double orifice nozzle within vaporization chamber by radiant heating

• Efficient liquid vaporization control when used in combination with LM-3000L Series

• Download the specification of VU-900 series

LSS Series: Automatic liquid supply apparatus designed to supply liquid from the inner tank to multiple tanks

• Support multiple/individual supply lines

• Clean design considering maintenance issue

• Various alarm functions equipped

• Various auto-purge functions equipped

• Safe and stable design considering physical properties of liquid

• Download the specification of LSS Series

LVS Series: Compact-size vapor delivery system utilizing bothliquid mass flow meter and vaporizer

• All-in-one design supports vapor supply with connection to various utilities

• Changes of system setting are available upon request before factory shipment according to physical properties of the liquid used, volume of liquid supplied, and operating environment

• Clean design considerig maintenance issue

• Various alarm functions equipped

• Safe and stable design considering physical properties of liquid

• Download the specification of LVS series

FL Series: Multi gas mixer supplies multiple gas types with specified flow rates and concentration utilizing mass flow controller

• Appropriately administering specific amount of gas mixture in accordance with the needs

• Automatically supplying gas mixtures with constant concentrations without being affected by the concentrations of the gas supplied

• Changes of system setting are available upon request before factory shipment according to physical properties of various gas types, volume supplied, and operating environment

• Clean design considering maintenance issue

• Various alarm functions equipped

• Safe and stable design considering physical properties of gas

• Download the specification of FL series

SVC Series: Baking unit delivers vaporized gas supply through a mass flow controller within an incorporated tank

• Optimizing temperature control of the supply line to avoid liquefaction

• All-in-one design supports baking supply with connection to various utilities

• Changes of system setting are available upon request before factory shipment according to physical properties of the liquid used, volume of vapor supplied, and operating environment

• Clean design considering maintenance issue

• Various alarm functions equipped

• Safe and stable design considering physical properties of gas

• Download the specification of SVC Series

Lintec  Others

Pioneering the development of gas and liquid vaporization systems, LINTEC provides our customers with a variety of products besides mass flow controllers. By creating sophisticated products and providing low-carbon solutions to our society, we strive to become an innovation-driven company that makes the impossible possible.