Dünya çapında şirketlerin HORIBA Grubu otomotiv Ar-Ge, süreç ve çevre izleme arasında değişen uygulamalar için araçların ve sistemlerin geniş bir dizi sağlar, in vitro bilimsel Ar-Ge ve QC ölçümlerinin geniş bir tıbbi teşhis, yarı iletken üretim ve metroloji. Kanıtlanmış kalite ve güvenilir performans HORIBA Brand yaygın güven kurduk

HORIBA   Algılama teknolojileri

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

HORIBA  Scientific Instruments & Systems

• Atomic Emission Spectroscopy
• Cathodoluminescence
• Detectors
• Diffraction Gratings
• Elemental Analyzers
• Ellipsometers
• Fluorescence Spectroscopy
• Forensics
• Glow Discharge
• Materials Characterization
• Microanalysis
• OEM Mini CCD Spectrometers
• Optical Spectroscopy
• Particle Characterization
• Petroleum Analyzer
• Photoluminescence
• Plasma Profiling TOFMS
• Process Equipment
• Raman Spectroscopy
• Sample Preparation
• Sulfur-in-Oil
• Surface Plasmon Resonance imaging (SPRi)
• Vacuum UV Spectroscopy
• Water Quality

 

Fluid Control

• Gas Mass Flow Control
• Liquid / Vapor Delivery
• Pressure Control

Mass flow controllers

• Mass Flow Toppage
• Industrial Gases
• Electronics
• Environmental Analysis/Medical Care

LIQUID AND VAPOR DELIVERY

Digital Liquid Mass Flow Meters / Controllers - LF-F/LV-F series

Featuring the world's first sensor with a unique cooling method, the LF-F and LV-F series can measure and control chemicals which can not be measured by thermal sensors which heat the liquid.

Mixed Injection System Liquid Vaporizers - MI/MV series

The MI/MV series can efficiently vaporize liquids using a gas-liquid mixture that allows for complete vaporization, this in a unit not much larger than a mass flow controller.

Direct Liquid Injection System - VC series

The compact vaporization system (VC series) does not require carrier gas, it can be used with either a liquid or gas flow meter, allowing for easy integration for direct liquid injection.

Liquid source vaporization systems TL series

The TL series enables large flow stable vaporization of liquid sources at atmospheric pressure.

Compact Baking System　LSC series

Compact baking system suitable for a range of liquid source delivery applications.

Liquid Auto Refill System - LU Series

The LU series automatic liquid refill system delivers chemicals directly to baking or direct liquid injection systems. Safe, efficient, and continuous supply of liquid sources.

PRESSURE CONTROL

HORIBASTEC has taken its world leading mass flow technology and developed a range of products to control pressure. Precision automatic pressure controllers can control pressure upstream or downstream of the regulator. Chamber pressures can be controlled by an exhaust pressure controller that features a high–resolution stepping motor and unique butterfly valve. For Back-side wafer cooling HORIBASTEC have He pressure controllers with integrated mass flow sensors. HORIBASTEC also offer a range of piezo electric all-metal sealed valves.

Wafer back side cooling system GR-300 series

The GR-300 series can control...

Automatic Pressure Regulator - UR-7300/Z704 Series

The UR series automatic pressure regulators are electronic regulators with high-precision pressure sensors and ...

Chamber Exhaust Pressure Controller. - EC-5000 series

The EC-5000 series exhaust pressure controller can maintain a consistent pressure...

Piezo actuator valve - PV series

The PV-1000/2000 series consists

Dry Process Monitoring

Semiconductor devices, Flat Panel Displays and Photo Voltaic cells remain at the cutting edge of technology. HORIBA has many years experience in this high-tech field. HORIBA instrumentation is used to measure the chamber conditions for example to monitor plasma to detect the end point in an etching process. The instrumentation is also widely used in gas analysis in a variety of applications from inline to offline and from high concentration to parts per trillion levels.

Residual Gas Analyzer - MICROPOLE System

The world's smallest complete mass spectrometer system

FTIR Gas Analyzer, - FG-100A single and dual cell analyzers

Suitable for semiconductor and FPD processes. The compact design makes it easy to maneuver, allowing it to be used for a wide range of applications. New line of single and dual cell gas analyzers

Gas Concentration Monitor, IR-150

The IR-150 is designed for real time inline concentration measurement using a Non-dispersive infrared (NDIR) method

DIGI Series - Semiconductor Manufacturing Process Monitor

Integrated management with an in-situ real time monitor "DIGI Series" for next-generation thin-film processes

Plasma Controller

Plasma Emission Controller RU-1000

Excellent Plasma Control over Reactive Sputtering.

The superb feedback control of the reactive gas flow in a reactive sputtering process helps you enhance product quality and achieve greater productivity by monitoring the plasma generated by sputtering or the voltage of the power supply for the sputtering process.

Compact Baking System　LSC series

Compact baking system suitable for a range of liquid source delivery applications.

 

X-Ray Fluorescence Analysis

Analytical Emissions Systems

On-Board Emissions Systems

Portable Emissions Systems

Dilution / Sampling Systems

Engine Test Systems

Driveline Test Systems

Vehicle Test Systems

Brake Test Systems

Wind Tunnel Balances

Automation Systems

High Performance Mass Flow Controllers

Reticle/Mask Particle Detection Systems

In-line Chemical Solution Concentration Monitors

Direct Injection Vaporizers

Automatic Spectroscopic Ellipsometers