MELEC GmbH – The High Pulse Power Company
Located in south Germany, MELEC produces and develops since 1998 DC-Pulse-Controller for plasma applications. With the experience of more than 15 years in power electronics and thin-film technology, MELEC sets standards in RD and industrial applications.
MELEC SIPP2000USB-Single
SIPP2000USB-Single pulse power controller is capable of operating with any DC power supply with floating outputs to upgrade a current averaged DC technology easily to the state-of-the-art pulse-power-control technology. SIPP2000USB-Single provides the most stable pulsed voltage and current output waveforms by means of the flexible pulse control parameters to meet versatile applications.
SIPP2000USB-Single can be locally controlled by any computer that runs WinXP or Win 7 using the MELEC GmbH control center (MCC)- software (developed with National Instruments LabVIEW™). The MCC is able to control tow DC Units that features: synchronized ON-OFF of two DC-Units, setting values for voltages, current and power and reading of DC-Unit working parameters.
One of the main features of the SIPP2000USB-Single is the integrated intuitive user defined pulse generation, as well as the synchronization of four SIPP2000USB-Single generators. Superimposition of HiPIMS, MF pulses or Bias for single or dual magnetron sputtering applications are the advantage of this generator.The quick arc-level control function with arc suppression time less than 2µs ensures your applications remain free of any arc damage.The new concept to control the real instant kinetics of this application provides more opportunities to obtain the optimized final solution.
DOWNLOAD DATASHEET
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Intuitive software control (MCC Software)
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Output modes: DC, UP+, UP- and BP
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Free Pulse Pattern generator
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Symmetric or asymmetric pulse output
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Arc suppression less than 2 µs
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4 x Synchron trigger output
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1 x Trigger input
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Max. 1000 V pulse output
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Max. 1000 A pulse output
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Integrated control of two DC Units
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+/-1000 V, max. voltage
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+/-1000 A, max. peak current
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DC – 50 kHz pulse frequency range
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DC negative mode
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Unipolar positive
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Unipolar negative
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Bipolar
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Symmetric and Asymmetric voltage output
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Flexible pulse generation
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MCC Software
| Manufacturer |
Type
|
DC Power (kW)
|
DC Voltage (V)
|
DC Current (A)
|
Pulse Peak Power (kW)
|
| MELEC |
10-1000
|
10kW
|
1000V
|
20A
|
1000kW
|
| MELEC |
20-1000
|
20kW
|
1000V
|
35A
|
1000kW
|
| MELEC |
30-1000
|
30kW
|
1000V
|
50A
|
1000kW
|
SPIK3000A: HiPIMS 5kW – 30kW
SPIK3000A pulse power controller is capable of operating with any DC power supply with floating outputs to upgrade a current averaged DC technology easily to the state-of-the-art pulse-power-control technology.
The SPIK3000A is the next evolution step in the SPIK line and provide an integrated function generator (FPPG) to generate up to 8 pulses in on-/off-time and polarity. Two SPIK3000A can be synchronized to switch parallel for higher peak current (up to 4000A peak-to-peak), synchronize mid frequency in the long off-time of an HiPIMS pulse or synchronize a pulsed bias to the HiPIMS pulse.
SPIK3000A provides the most stable pulsed voltage and current output waveforms. The SPIK3000A is controlled via serial communication and has the option to integrate any standard industrial communication interfaces. The quick arc-level-control-function with arc suppression time, less than 2µs ensures the applications remain free of any arc damage. The SPIK3000A can only be driven in symmetric voltage. The new concept to control the real instant kinetics of the application provides more opportunities to obtain the optimized your final solution.
DOWNLOAD DATASHEET
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ARM Processor control
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FPPG (Free Pulse Pattern Controller)
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Symmetric voltage output
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Fast arc detection and suppression less than 2 µs
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Remote interface (Profibus / RS485)
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1 x Trigger input
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2 x Trigger output
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Fast parallel interface (Stacking)
| Manufacturer |
Type
|
DC Power(kW)
|
DC Voltage (V)
|
DC Current (A)
|
Pulsed Peak Power (kW)
|
| MELEC |
A-10
|
10kW
|
1000V
|
20A
|
1000kW
|
| MELEC |
A-20
|
20kW
|
1000V
|
35A
|
1000kW
|
| MELEC |
A-30
|
30kW
|
1000V
|
50A
|
1000kW
|
SIPP2000USB-Dual
DOWNLOAD DATASHEET
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2 x synchronized pulse channels
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Intuitive software control (MCC Software)
-
Output modes: DC, UP+, UP- and BP
-
Free Pulse Pattern generator
-
Symmetric pulse output
-
Arc suppression less than 2 µs
-
4 x Synchron trigger output
-
2 x Trigger input
-
Max. 1000 V pulse output per channel
-
Max. 500 A pulse output per channel
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Integrated control of two DC Units
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Reconfigurable for 1000A pulse peak output
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2 x +/-1000 V, max. voltage
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2 x +/-500 A, max. current
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DC – 50 kHz pulse frequency
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DC negative mode
-
Unipolar positive
-
Unipolar negative
-
Bipolar
-
Flexible pulse generation
-
Symmetric voltage output
-
MCC Software
| Manufacturer |
Type
|
DC (kW)
|
DC pulsed power (kW)
|
| MELEC |
10-500-D
|
2 x 5
|
2x 500kW
|
| MELEC |
20-500-D
|
2 x 10
|
|
| MELEC |
30-1000
|
30
|
|
DC Sources: 0,5kW – 30kW
GS – Type: 0,5kW – 3kW
The compact power supplies were developed for magnetrons in production plants and laboratories. Easy and safe operation makes these power supplies very flexible for many processes. The arc-handling adjusts automatically to different process parameters, so that programming is not necessary. The units are designed for the mounting in 19″-racks.
| Manufacturer |
Type
|
DC Power
|
DC Voltage
|
DC Current
|
| MELEC |
05/1000
|
0,5kW
|
1000V
|
0,7A
|
| MELEC |
10/1000
|
1kW
|
1000V
|
1,4A
|
| MELEC |
15/1000
|
1,5kW
|
1000V
|
2,4A
|
| MELEC |
20/1000
|
2kW
|
1000V
|
2,8A
|
| MELEC |
30/1000
|
3kW
|
1000V
|
4,2A
|
GX-Sputtering Power Supplies are able to eliminate up to 80.000 Arcs per second automatically. This extreme capability combined with the small size of the power supply is outstanding and significant for the series GX, which also has an integrated cathode clamp diode. The power supplies can be operated with full nominal power without limitation of the duty cycle.
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Automatic Arc Handling
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Internal Close Loop for U,I,P
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Analog Interface (AS6)
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Serial Interface RS232/RS485
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Water cooling
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Display of actual value for U,I or P
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½ 19″–case, 3 HU
| Manufacturer |
Type
|
DC Power
|
DC Voltage
|
DC Current
|
| MELEC |
50/1000
|
5kW
|
1000V
|
10A
|
| MELEC |
80/1000
|
8kW
|
1000V
|
16A
|
| MELEC |
100/1000
|
10kW
|
1000V
|
20A
|
| MELEC |
150/1000
|
15kW
|
1000V
|
30A
|
The very compact design of ½ 19” width and 5 HU is especially designed for production plants without cabinets. The HX has mounting flanges and can be integrated into or attached to the plasma chamber in any position. The display can be swivelled and separated from the power supply. An efficient water cooling ensures highest reliability even in non-air-conditioned rooms. In order to avoid condensation water an external magnetic valve can be connected via the integrated temperature control. The output power can be increased up to 240kW in parallel operation. The special electronic design allows master-slave-operation as well as parallel operation via Interface-Combiner or Profibus. The extreme fast Arc-Handling works completely automatic, so that no parameters have to be set.
-
Automatic Arc Handling
-
Internal Close Loop for U,I,P
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Analog Interface (AS6)
-
Serial Interface RS232/RS485
-
Water cooling
-
½ 19”- case, 5 HU
| Manufacturer |
Type
|
DC (kW)
|
DC Current
|
| MELEC |
150/1000
|
15 kW
|
25 A
|
| MELEC |
200/1000
|
20 kW
|
35 A
|
| MELEC |
250/1000
|
25 kW
|
40 A
|
| MELEC |
300/1000
|
30 kW
|
50 A
|
Measuring Systems
MELECs Measurment System (MS) is an simple way to scope your process. The MS has the option to measure up to four channels ( 2 x U and 2 x I) with a ratio of 1000V:10V and up to 1000A:10V.
The MS can be included in system racks whre the voltage and current transducer are mounted or used stand alone in combination with Terminal Boxes (TB). This Terminal Boxes include the Voltage and Current transducer in a stable metal case.
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U Ratio: 0V – 1000V = 0V – 10V
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I Ratio: 0V – ( 500 A / 1000A ) = 0V – 10V
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Trigger Bypass to front
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1 HE
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TB (Terminal Box) include voltage and current transducer
| Manufacturer |
Type
|
Voltage
|
Current
|
| MELEC |
MS-500
|
1 x 1000 V
|
1 x 500 A
|
| MELEC |
MS-500-S-TB
|
1 x 1000 V
|
1 x 500 A
|
| MELEC |
MS-500-D
|
2 x 1000 V
|
2 x 500 A
|
| MELEC |
MS-500-D-TB
|
2 x 1000 V
|
2 x 500 A
|
| MELEC |
MS-1000-S
|
1 x 1000 V
|
1 x 1000 A
|
| MELEC |
MS-1000-S-TB
|
1 x 1000 V
|
1 x 1000 A
|
| MELEC |
MS-1000-D-TB
|
2 x 1000 V
|
2 x 1000 A
|
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