ULVAC Technologies

ULVAC...

...as a general manufacturer of vacuum equipment, also focuses energy on the development of components in order to offer a wide-range component lineup.

...delivers all types of products ranging from components such as vacuum valves, flanges, and terminals, to vacuum pumps and measurement and analysis equipment.

 

Ulvac Rough&Middle Vacuum Pump

  • Screw Type Dry Vacuum Pump

  • Multi-Stage Roots Type Dry Vacuum Pump

  • Scroll Type Dry Vacuum Pump

  • Diaphragm Type Dry Vacuum Pump

  • Rocking Piston Type Dry Vacuum Pump

  • Oil Rotary Vacuum Pump

  • Mechanical Booster Pump

  • Vacuum Pumping System

 

Screw Type Dry Vacuum Pump

LS Series

LS120A

ULVAC

 

Screw Type Dry Vacuum Pump

LS Series

LS300A

ULVAC

 

Screw Type Dry Vacuum Pump

LS Series

LS600A

ULVAC

 

Screw Type Dry Vacuum Pump

LS Series

LS1200A

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR60

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR90

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR180

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR421

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR421-T

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR300

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR600

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR1200

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR1800

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR3601

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR3601-T(TT)

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR3601-R

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR3601-TR(TTR)

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

HR/UR Series

HR60

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

HR/UR Series

HR90

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

HR/UR Series

UR421-T

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

HR/UR Series

HR300

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

HR/UR Series

HR600

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

HR/UR Series

UR600

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

HR/UR Series

HR1200

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

HR/UR Series

UR1200

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

HR/UR Series

UR1800

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

HR/UR Series

UR3601-TT

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

CR Series

CR16B

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

CR Series

CR30B

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

CR Series

CR60B

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

CR Series

CR300B

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

GR Series

GR60A

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

GR Series

GR90A

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

GR Series

GR180A

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

Silencer

RS-01

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

Silencer

RS-02

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

Silencer

RSー03

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

Power Saving Attachment

ECO-SHOCK:ES10

ULVAC

 

Multi-Stage Roots Type Dry Vacuum Pump

Power Saving Attachment

ECO-SHOCK:ES4A

ULVAC

 

Oil Rotary Vacuum Pump

VD Series

VD151

ULVAC

 

Oil Rotary Vacuum Pump

VD Series

VD201

ULVAC

 

Oil Rotary Vacuum Pump

VD Series

VD30C

ULVAC

 

Oil Rotary Vacuum Pump

VD Series

VD40C

ULVAC

 

Oil Rotary Vacuum Pump

VD Series

VD60C

ULVAC

 

Oil Rotary Vacuum Pump

VD Series

VD90C

ULVAC

 

Oil Rotary Vacuum Pump

VS Series

VS1501

ULVAC

 

Oil Rotary Vacuum Pump

VS Series

VS2401

ULVAC

 

Oil Rotary Vacuum Pump

VS Series

VS650A

ULVAC

 

Oil Rotary Vacuum Pump

VS Series

VS750A

ULVAC

 

Oil Rotary Vacuum Pump

PVD Series

PVD-180

ULVAC

 

Oil Rotary Vacuum Pump

PVD Series

PVD-360

ULVAC

 

Oil Rotary Vacuum Pump

PKS Series

PKS-016

ULVAC

 

Oil Rotary Vacuum Pump

PKS Series

PKS-030

ULVAC

 

Oil Rotary Vacuum Pump

PKS Series

PKS-070B

ULVAC

 

Oil Rotary Vacuum Pump

Oil Mist Trap

TMX-1

ULVAC

 

Oil Rotary Vacuum Pump

Oil Mist Trap

TM201

ULVAC

 

Oil Rotary Vacuum Pump

Oil Mist Trap

TM401

ULVAC

 

Oil Rotary Vacuum Pump

Oil Mist Trap

TM-2

ULVAC

 

Oil Rotary Vacuum Pump

Oil Mist Trap

TM-2F

ULVAC

 

Oil Rotary Vacuum Pump

Oil Mist Trap

TM-3

ULVAC

 

Oil Rotary Vacuum Pump

Oil Mist Trap

TM-3F

ULVAC

 

Oil Rotary Vacuum Pump

Oil Mist Trap

TM-4

ULVAC

 

Oil Rotary Vacuum Pump

Oil Mist Trap

TM-4F

ULVAC

 

Oil Rotary Vacuum Pump

Oil Mist Trap

TM-4S

ULVAC

 

Oil Rotary Vacuum Pump

ULVOIL Series(OIL)

R-7

ULVAC

 

Oil Rotary Vacuum Pump

ULVOIL Series(OIL)

R-80

ULVAC

 

Oil Rotary Vacuum Pump

ULVOIL Series(OIL)

SuperR-7000

ULVAC

 

Mechanical Booster Pump

PRC Series

PRC-003A

ULVAC

 

Mechanical Booster Pump

PRC Series

PRC-006A

ULVAC

 

Mechanical Booster Pump

PRC Series

PRC-012A

ULVAC

 

Mechanical Booster Pump

PRC Series

PRC-018A

ULVAC

 

Mechanical Booster Pump

PMBーD Series

PMB100D

ULVAC

 

Mechanical Booster Pump

PMBーD Series

PMB300D

ULVAC

 

Mechanical Booster Pump

PMBーD Series

PMB600D

ULVAC

 

Mechanical Booster Pump

PMBーD Series

PMB1200D

ULVAC

 

Mechanical Booster Pump

PMBーD Series

PMB2400D

ULVAC

 

Mechanical Booster Pump

PMB-C Series

PMBー040C

ULVAC

 

Mechanical Booster Pump

PMB-C Series

PMB-060C

ULVAC

 

Vacuum Pumping System

YMV Series

YMV-01A

ULVAC

 

Vacuum Pumping System

YMV Series

YMV-03A

ULVAC

 

Vacuum Pumping System

YMV Series

YMV-06A

ULVAC

 

Vacuum Pumping System

YMV Series

YMV-12A

ULVAC

 

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 2st Stage Type

DAP-6D

ULVAC KIKO

 

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 2st Stage Type

DAP-9D-DC24

ULVAC KIKO

 

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 2st Stage Type

DA-30D

ULVAC KIKO

 

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 2st Stage Type

DAT-50D

ULVAC KIKO

 

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 2st Stage Type

DA-20D

ULVAC KIKO

 

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 2st Stage Type

DA-41D

ULVAC KIKO

 

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 2st Stage Type

DA-60D

ULVAC KIKO

 

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 2st Stage Type

DA-121D

ULVAC KIKO

 

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 1st Stage Type

DAP-12S

ULVAC KIKO

 

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 1st Stage Type

DAP-18S-DC24

ULVAC KIKO

 

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 1st Stage Type

DA-60S

ULVAC KIKO

 

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 1st Stage Type

DAT-100S

ULVAC KIKO

 

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 1st Stage Type

DA-40S

ULVAC KIKO

 

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 1st Stage Type

DA-81S

ULVAC KIKO

 

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 1st Stage Type

DA-120S

ULVAC KIKO

 

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 1st Stage Type

DA-241S

ULVAC KIKO

 

Diaphragm Type Dry Vacuum Pump

DAU・MD Series

DAU-20

ULVAC KIKO

 

Diaphragm Type Dry Vacuum Pump

DTU・MD-C Series

DTU-20

ULVAC KIKO

 

Diaphragm Type Dry Vacuum Pump

DTC Series

DTC-22

ULVAC KIKO

 

Diaphragm Type Dry Vacuum Pump

DTC Series

DTC-41

ULVAC KIKO

 

Diaphragm Type Dry Vacuum Pump

DTC Series

DTC-60

ULVAC KIKO

 

Rocking Piston Type Dry Vacuum Pump

DOP Series

DOP-40D

ULVAC KIKO

 

Rocking Piston Type Dry Vacuum Pump

DOP Series

DOP-80S

ULVAC KIKO

 

Rocking Piston Type Dry Vacuum Pump

DOP Series

DOP-80SP

ULVAC KIKO

 

Rocking Piston Type Dry Vacuum Pump

DOP Series

DOP-120SY

ULVAC KIKO

 

Rocking Piston Type Dry Vacuum Pump

DOP Series

DOP-181SA

ULVAC KIKO

 

Rocking Piston Type Dry Vacuum Pump

DOP Series

DOP-301SB

ULVAC KIKO

 

Rocking Piston Type Dry Vacuum Pump

DOP Series

DOP-400SB

ULVAC KIKO

 

Rocking Piston Type Dry Vacuum Pump

DOP Series

DOP-420SA

ULVAC KIKO

 

Scroll Type Dry Vacuum Pump

DIS・DISL Series

DIS-90

ULVAC KIKO

 

Scroll Type Dry Vacuum Pump

DIS・DISL Series

DIS-251

ULVAC KIKO

 

Scroll Type Dry Vacuum Pump

DIS・DISL Series

DIS-501

ULVAC KIKO

 

Scroll Type Dry Vacuum Pump

DIS・DISL Series

DISL-102

ULVAC KIKO

 

Scroll Type Dry Vacuum Pump

DIS・DISL Series

DISL-503

ULVAC KIKO

 

Multi-Stage Roots Type Dry Vacuum Pump

RDA Series

RDA-281H

ULVAC KIKO

 

Multi-Stage Roots Type Dry Vacuum Pump

RDA Series

RDA-501H

ULVAC KIKO

 

Oil Rotary Vacuum Pump

GLD・GLS Series

GLD-040

ULVAC KIKO

 

Oil Rotary Vacuum Pump

GLD・GLS Series

GLD-137AA

ULVAC KIKO

 

Oil Rotary Vacuum Pump

GLD・GLS Series

GLD-137CC

ULVAC KIKO

 

Oil Rotary Vacuum Pump

GLD・GLS Series

GLD-202AA

ULVAC KIKO

 

Oil Rotary Vacuum Pump

GLD・GLS Series

GLD-202BB

ULVAC KIKO

 

Oil Rotary Vacuum Pump

GLD・GLS Series

GLD-280A

ULVAC KIKO

 

Oil Rotary Vacuum Pump

GHD Series

GHD-031A

ULVAC KIKO

 

Oil Rotary Vacuum Pump

GHD Series

GHD-101A

ULVAC KIKO

 

Oil Rotary Vacuum Pump

GCD Series

GCD-051X

ULVAC KIKO

 

Oil Rotary Vacuum Pump

GCD Series

GCD-136X

ULVAC KIKO

 

Oil Rotary Vacuum Pump

GCD Series

GCD-201X

ULVAC KIKO

 

Oil Rotary Vacuum Pump

ULVOIL Series(OIL)

R-2

ULVAC KIKO

 

Oil Rotary Vacuum Pump

SMR Series(OIL)

SMR-100

ULVAC KIKO

 

Oil Rotary Vacuum Pump

SO-M Series(OIL)

SO-M

ULVAC KIKO

 

Mechanical Booster Pump

MBS Series

MBS-053

ULVAC KIKO

 

Vacuum Pumping System

VM Series

VMR-050

ULVAC KIKO

 

Scroll Type Dry Vacuum Pump

SGT Series

SGT-100

ULVAC KIKO

 

Scroll Type Dry Vacuum Pump

SGT Series

SGT-200

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Oil Mist Trap

OMT-050A

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Oil Mist Trap

OMT-100A

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Oil Mist Trap

OMT-200A

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Inline Trap

OMI-100

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Inline Trap

OMI-200

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Oil Mist Trap Adapter

G3/4male×G1

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Oil Mist Separator

OMC-050

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Oil Mist Separator

OMC-200

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Fore Line Trap

OFI-050C

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Fore Line Trap

OFI-200C

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Fore Line Trap

OFI-050V

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Fore Line Trap

OFI-200V

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Hose Port Suction Pipe

O.D.Φ8×M20

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Hose Port Suction Pipe

O.D.Φ12×M20

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Hose Port Suction Pipe

O.D.Φ15×M20

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Hose Port Suction Pipe

O.D.Φ18×M20

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Hose Port Suction Pipe

O.D.Φ22×M20

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Hose Port Suction Pipe

O.D.Φ27×□40

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Hose Port Suction Pipe

O.D.Φ27×□50

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Hose Port Suction Pipe

O.D.Φ12 (GHD-031A)

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Hose Port Suction Pipe

O.D.Φ18 (GHD-031A)

ULVAC KIKO

 

Oil Rotary Vacuum Pump

KF-25 Suction Pipe

KF-25×M20

ULVAC KIKO

 

Oil Rotary Vacuum Pump

KF-25 Suction Pipe

KF-25×□40

ULVAC KIKO

 

Oil Rotary Vacuum Pump

KF-25 Suction Pipe

KF-25×□50

ULVAC KIKO

 

Oil Rotary Vacuum Pump

R screw types Suction Pipe

A-type suction pipe (R1/4-L20 Male × M20)

ULVAC KIKO

 

Oil Rotary Vacuum Pump

R screw types Suction Pipe

B-type suction pipe (R1/4 Female × M20)

ULVAC KIKO

 

Oil Rotary Vacuum Pump

R screw types Suction Pipe

C-type suction pipe (R1/4-L10 Male × M20)

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Adapter

40mm sq Adapter (M20 Female)

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Adapter

50mm sq Adapter (M20 Female)

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Adapter

KF25 suction pipe(KF25×M20 Female)

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Hose Port Exhaust Pipe

Φ15×G3/4

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Hose Port Exhaust Pipe

Φ18×G3/4

ULVAC KIKO

 

Oil Rotary Vacuum Pump

Hose Port Exhaust Pipe

Φ27×G1

ULVAC KIKO

 

Oil Rotary Vacuum Pump

KF-16 Exhaust Pipe

KF-16×G3/4

ULVAC KIKO

 

Oil Rotary Vacuum Pump

KF-25 exhaust pipe

KF-25×G3/4

ULVAC KIKO

 

Oil Rotary Vacuum Pump

KF-25 exhaust pipe

KF-25×G1

ULVAC KIKO

 

Ulvac High Vacuum Pump

  • Cryo Pump
  • Super Trap
  • Turbo Molecular Pump
  • Ion Pump
  • Oil Diffusion Ejector Pump
  • Vacuum Pumping System

 

 

Ion Pump

PST Series

PST-030CU/AU

ULVAC

 

Ion Pump

PST Series

PST-050CU/AU

ULVAC

 

Ion Pump

PST Series

PST-100CX/AX

ULVAC

 

Ion Pump

PST Series

PST-110AU

ULVAC

 

Ion Pump

PST Series

PST-200CXII/AXII

ULVAC

 

Ion Pump

PST Series

PSTー400CXII/AXII

ULVAC

 

Ion Pump

PST Series Controller

GST-07L-B

ULVAC

 

Turbo Molecular Pump

UTMーFW Series

UTM-350FW

ULVAC

 

Turbo Molecular Pump

UTMーFW Series

UTM-480FW

ULVAC

 

Turbo Molecular Pump

UTMーFW Series

UTM-800FW

ULVAC

 

Turbo Molecular Pump

UTMーFW Series

UTM-1001FW

ULVAC

 

Turbo Molecular Pump

UTMーFW Series

UTM-1400FW

ULVAC

 

Turbo Molecular Pump

UTMーFW Series

UTM-2300FW

ULVAC

 

Turbo Molecular Pump

UTMーFW Series

UTM-3301FW

ULVAC

 

Turbo Molecular Pump

UTMーFH Series

UTM-350FH

ULVAC

 

Turbo Molecular Pump

UTMーFH Series

UTM-480FH

ULVAC

 

Turbo Molecular Pump

UTMーFH Series

UTM-800FH

ULVAC

 

Turbo Molecular Pump

UTMーFH Series

UTM-1001FH

ULVAC

 

Turbo Molecular Pump

UTMーFH Series

UTM-3303FH

ULVAC

 

Turbo Molecular Pump

UTM-MI Series

UTM1200A

ULVAC

 

Turbo Molecular Pump

UTM-MI Series

UTM1600A

ULVAC

 

Turbo Molecular Pump

UTM-MI Series

UTM2300A

ULVAC

 

Turbo Molecular Pump

UTM-MI Series

UTM3400A

ULVAC

 

Turbo Molecular Pump

UTMーB Series

UTM70B

ULVAC

 

Turbo Molecular Pump

UTMーB Series

UTM300B

ULVAC

 

Turbo Molecular Pump

YTP Series

YTPー50MB/SAB

ULVAC

 

Turbo Molecular Pump

YTP Series

YTPー300MB/SAB

ULVAC

 

Turbo Molecular Pump

Desktop YTP

YTP70A-D

ULVAC

 

Oil Diffusion Ejector Pump

PBL Series

PBL-02

ULVAC

 

Oil Diffusion Ejector Pump

PBL Series

PBL-04

ULVAC

 

Oil Diffusion Ejector Pump

PBL Series

PBL-06

ULVAC

 

Oil Diffusion Ejector Pump

PBL Series

PBL-10

ULVAC

 

Oil Diffusion Ejector Pump

PBL Series

PBL-14

ULVAC

 

Oil Diffusion Ejector Pump

PBL Series

PBL-20

ULVAC

 

Oil Diffusion Ejector Pump

ULK Series

ULK-04A (Oil D-11)

ULVAC

 

Oil Diffusion Ejector Pump

ULK Series

ULK-06A (Oil D-11)

ULVAC

 

Oil Diffusion Ejector Pump

ULK Series

ULK-10A (Oil D-11)

ULVAC

 

Oil Diffusion Ejector Pump

ULK Series

ULK-14A (Oil D-11)

ULVAC

 

Oil Diffusion Ejector Pump

ULK Series

ULK-04A (Oil D-31)

ULVAC

 

Oil Diffusion Ejector Pump

ULK Series

ULK-06A (Oil D-31)

ULVAC

 

Oil Diffusion Ejector Pump

ULK Series

ULK-10A (Oil D-31)

ULVAC

 

Oil Diffusion Ejector Pump

ULK Series

ULK-14A (Oil D-31)

ULVAC

 

Oil Diffusion Ejector Pump

PFL Series

PFL-22

ULVAC

 

Oil Diffusion Ejector Pump

PFL Series

PFL-22TM

ULVAC

 

Oil Diffusion Ejector Pump

PFL Series

PFL-36

ULVAC

 

Oil Diffusion Ejector Pump

PFL Series

PFL-52

ULVAC

 

Oil Diffusion Ejector Pump

BW Series

BW-02

ULVAC

 

Oil Diffusion Ejector Pump

BW Series

BW-04B

ULVAC

  • Oil Diffusion Ejector Pump

    BW Series

    BW-06B

    ULVAC

 

Oil Diffusion Ejector Pump

BW Series

BW-10

ULVAC

 

Oil Diffusion Ejector Pump

BW Series

BW-14

ULVAC

 

Oil Diffusion Ejector Pump

BW Series

BW-20

ULVAC

 

Oil Diffusion Ejector Pump

BW Series

BW-22

ULVAC

 

Oil Diffusion Ejector Pump

BW Series

BW-36

ULVAC

 

Oil Diffusion Ejector Pump

BW Series

BW-52

ULVAC

 

Vacuum Pumping System

VPC Series

VPC-051

ULVAC KIKO

 

Vacuum Pumping System

VPC Series

VPC-051A

ULVAC KIKO

 

Vacuum Pumping System

VPC Series

VPC-250F

ULVAC KIKO

 

Vacuum Pumping System

DEPOX Series

VFR-200M/X

ULVAC KIKO

 

Vacuum Pumping System

DEPOX Series

VWR-400M/X

ULVAC KIKO

 

Vacuum Pumping System

DEPOX Series

VTR-350M/X

ULVAC KIKO

  • Vacuum Pumping System

    DEPOX Series

    VTS-350M/X

    ULVAC KIKO

 

Vacuum Pumping System

VPT Series

VPT-060

ULVAC KIKO

 

Cryo Pump

CRYO-U Series

CRYO-U4H

ULVAC CRYOGENICS

 

Cryo Pump

CRYO-U Series

CRYO-U6H

ULVAC CRYOGENICS

 

Cryo Pump

CRYO-U Series

CRYO-U8H

ULVAC CRYOGENICS

 

Cryo Pump

CRYO-U Series

CRYO-U8H-U

ULVAC CRYOGENICS

 

Cryo Pump

CRYO-U Series

CRYO-U8HL

ULVAC CRYOGENICS

 

Cryo Pump

CRYO-U Series

CRYO-U8HSP

ULVAC CRYOGENICS

 

Cryo Pump

CRYO-U Series

CRYO-U10H

ULVAC CRYOGENICS

 

Cryo Pump

CRYO-U Series

CRYO-U10HSP

ULVAC CRYOGENICS

 

Cryo Pump

CRYO-U Series

CRYO-U12H

ULVAC CRYOGENICS

 

Cryo Pump

CRYO-U Series

CRYO-U12HL

ULVAC CRYOGENICS

 

Cryo Pump

CRYO-U Series

CRYO-U12HSP

ULVAC CRYOGENICS

 

Cryo Pump

CRYO-U Series

CRYO-U16

ULVAC CRYOGENICS

 

Cryo Pump

CRYO-U Series

CRYO-U16P

ULVAC CRYOGENICS

 

Cryo Pump

CRYO-U Series

CRYO-U20P

ULVAC CRYOGENICS

 

Cryo Pump

CRYO-U Series

CRYO-U20H

ULVAC CRYOGENICS

 

Cryo Pump

CRYO-U Series

CRYO-U22P

ULVAC CRYOGENICS

 

Cryo Pump

CRYO-U Series

CRYO-U22WB

ULVAC CRYOGENICS

 

Cryo Pump

CRYO-U Series

CRYO-U22H

ULVAC CRYOGENICS

 

Cryo Pump

CRYO-U Series

CRYO-U30H

ULVAC CRYOGENICS

 

Super Trap

CRYO-T Series

CRYO-T4

ULVAC CRYOGENICS

 

Super Trap

CRYO-T Series

CRYO-T6

ULVAC CRYOGENICS

 

Super Trap

CRYO-T Series

CRYO-T8

ULVAC CRYOGENICS

 

Super Trap

CRYO-T Series

CRYO-T10

ULVAC CRYOGENICS

 

Super Trap

CRYO-T Series

CRYO-T12

ULVAC CRYOGENICS

 

Super Trap

CRYO-T Series

CRYO-TS10

ULVAC CRYOGENICS

 

Super Trap

CRYO-T Series

CRYO-TS14

ULVAC CRYOGENICS

 

Super Trap

CRYO-T Series

CRYO-TS22

ULVAC CRYOGENICS

 

Cryo Pump

Compressor Unit

C10

ULVAC CRYOGENICS

 

Cryo Pump

Compressor Unit

C10AT

ULVAC CRYOGENICS

 

Cryo Pump

Compressor Unit

C15R

ULVAC CRYOGENICS

 

Cryo Pump

Compressor Unit

C30VR

ULVAC CRYOGENICS

 

Cryo Pump

Compressor Unit

C30VRT

ULVAC CRYOGENICS

 

Cryo Pump

Compressor Unit

C30MVR

ULVAC CRYOGENICS

 

Cryo Pump

Compressor Unit

C30MVRT

ULVAC CRYOGENICS

 

Cryo Pump

Compressor Unit

C30PVRT

ULVAC CRYOGENICS

 

Cryo Pump

Compressor Unit

C30PMVRT

ULVAC CRYOGENICS

 

Cryo Pump

Compressor Unit

C40R

ULVAC CRYOGENICS

 

Cryo Pump

Regeneration Gas Purge PR Unit

PR1A

ULVAC CRYOGENICS

 

Cryo Pump

Regeneration Gas Purge PR Unit

PR2A

ULVAC CRYOGENICS

 

Cryo Pump

Regeneration Gas Purge PR Unit

PR3A

ULVAC CRYOGENICS

 

Cryo Pump

Band Heater

RBH-6

ULVAC CRYOGENICS

 

Cryo Pump

Band Heater

RBH-8

ULVAC CRYOGENICS

 

Cryo Pump

Band Heater

RBH-8HSP

ULVAC CRYOGENICS

 

Cryo Pump

Band Heater

RBH-10

ULVAC CRYOGENICS

 

Cryo Pump

Band Heater

RBH-12

ULVAC CRYOGENICS

 

Cryo Pump

Band Heater

RBH-16

ULVAC CRYOGENICS

 

Cryo Pump

Band Heater

RBH-20

ULVAC CRYOGENICS

 

Cryo Pump

Band Heater

RBH-22P

ULVAC CRYOGENICS

 

Cryo Pump

Band Heater

RBH-22

ULVAC CRYOGENICS

 

Cryo Pump

Band Heater

RBH-30

ULVAC CRYOGENICS

 

Cryo Pump

2nd Stage Temperrature Display

MBD-S

ULVAC CRYOGENICS

 

Cryo Pump

2nd Stage Temperrature Display

MBD-T

ULVAC CRYOGENICS

 

Ulvac Vacuum Gauge

ULVAC vacuum gauges have been developed based on rich experience and technology in the vacuum field. From Pirani vacuum gauges to ionization vacuum gauges and ultra high vacuum gauges, in other words, from atmospheric pressure to ultra-high vacuum (10-12 Pa), we have a lineup of vacuum gauges for all industrial areas, measurement conditions, and applications

  • Transducer Type
  • General Purpose Type

 

Transducer Type

Pirani Vacuum Gauge

Smartphone-Direct Pirani Gauge

SWU10-U

ULVAC

 

Transducer Type

Multi Ionization Gauge

SH2 Series

SH2-1

ULVAC

 

Transducer Type

Multi Ionization Gauge

SH2 Series

SH2-2

ULVAC

 

Transducer Type

Multi Ionization Gauge

SH2 Series

M-34(NW16)

ULVAC

 

Transducer Type

Multi Ionization Gauge

SH2 Series

M-35(NW25)

ULVAC

 

Transducer Type

Multi Ionization Gauge

SH2 Series

M-36(ICF070)

ULVAC

 

Transducer Type

Multi Ionization Gauge

ST2 Series

ST2-1

ULVAC

 

Transducer Type

Multi Ionization Gauge

ST2 Series

ST2-2

ULVAC

 

Transducer Type

Multi Ionization Gauge

ST2 Series

SWT-16(NW16)

ULVAC

 

Transducer Type

Multi Ionization Gauge

ST2 Series

SWT-25(NW25)

ULVAC

 

Transducer Type

Pressure Sensor Unit

SAU

SAU

ULVAC

 

Transducer Type

Ceramic Capacitance Manometer

CCMT-D Series

CCMT-1000D

ULVAC

 

Transducer Type

Ceramic Capacitance Manometer

CCMT-D Series

CCMT-100D

ULVAC

 

Transducer Type

Ceramic Capacitance Manometer

CCMT-D Series

CCMT-10D

ULVAC

 

Transducer Type

Ceramic Capacitance Manometer

CCMT-D Series

CCMT-1D

ULVAC

 

Transducer Type

Ceramic Capacitance Manometer

Display Series_Ceramic Capacitance Manometer

GM-2001

ULVAC

 

Transducer Type

Ceramic Capacitance Manometer

Display Series_Ceramic Capacitance Manometer

GM-2002

ULVAC

 

Transducer Type

Atmosphere Pirani Gauge

SW1

SW1-1

ULVAC

 

Transducer Type

Atmosphere Pirani Gauge

SW1

SW1-2

ULVAC

 

Transducer Type

Atmosphere Pirani Gauge

SW1

SWP-16(NW16)

ULVAC

 

Transducer Type

Atmosphere Pirani Gauge

SW1

SWP-25(NW25)

ULVAC

 

Transducer Type

Atmosphere Pirani Gauge

SW1

SWP-P18(Φ18)

ULVAC

 

Transducer Type

Atmosphere Pirani Gauge

SW1

SWP-P15(Φ15)

ULVAC

 

Transducer Type

Atmosphere Pirani Gauge

SW1

SWP-CF16(ICF034)

ULVAC

 

Transducer Type

Atmosphere Pirani Gauge

SW1

SWP-R1/8(R1/8)

ULVAC

 

Transducer Type

Pirani Vacuum Gauge

SP1

SP1

ULVAC

 

Transducer Type

Pirani Vacuum Gauge

SP1

WP-01(Φ18)

ULVAC

 

Transducer Type

Pirani Vacuum Gauge

SP1

WP-02(Φ15)

ULVAC

 

Transducer Type

Pirani Vacuum Gauge

SP1

WP-03(R3/8)

ULVAC

 

Transducer Type

Pirani Vacuum Gauge

SP1

WP-16(NW16)

ULVAC

 

Transducer Type

Cold Cathode Ionization Gauge

SC1

SC1

ULVAC

 

Transducer Type

Cold Cathode Ionization Gauge

SC1

C-21(Φ18/15)

ULVAC

 

Transducer Type

Cold Cathode Ionization Gauge

SC1

C-23(ICF034)

ULVAC

 

Transducer Type

Cold Cathode Ionization Gauge

SC1

C-24(NW16)

ULVAC

 

Transducer Type

Cold Cathode Ionization Gauge

SC1

C-25(NW25)

ULVAC

 

Transducer Type

Display Unit

Display Series_Display Unit

ISG1

ULVAC

 

Transducer Type

Display Unit

Display Series_Display Unit

IM1R1

ULVAC

 

Transducer Type

Display Unit

Display Series_Display Unit

IM2R1

ULVAC

 

General Purpose Type

Extremely High Vacuum Gauge

AxTRAN Series

AxTRAN

ULVAC

 

General Purpose Type

Extremely High Vacuum Gauge

AxTRAN Series

X-11(ICF070)

ULVAC

 

General Purpose Type

Ionization Gauge

GI Series

GI-M2

ULVAC

 

General Purpose Type

Ionization Gauge

GI Series

M-11(Φ18)

ULVAC

 

General Purpose Type

Ionization Gauge

GI Series

M-12(Φ15)

ULVAC

 

General Purpose Type

Ionization Gauge

GI Series

M-13(ICF034)

ULVAC

 

General Purpose Type

Ionization Gauge

GI Series

M-14(NW16)

ULVAC

 

General Purpose Type

Ionization Gauge

GI Series

M-15(NW25)

ULVAC

 

General Purpose Type

Ionization Gauge

GI Series

GI-D7(WIT)

ULVAC

 

General Purpose Type

Ionization Gauge

GI Series

WIT-G1(Φ18/15)

ULVAC

 

General Purpose Type

Ionization Gauge

GI Series

WIT-G8(Φ18/15)

ULVAC

 

General Purpose Type

Ionization Gauge

GI Series

GI-D7(WIB)

ULVAC

 

General Purpose Type

Ionization Gauge

GI Series

WIB-G5(Φ18/15)

ULVAC

 

General Purpose Type

Ionization Gauge

GI Series

WIB-N3(ICF070)

ULVAC

 

General Purpose Type

Pirani Gauge

GP-G Series

GPー1000G

ULVAC

 

General Purpose Type

Pirani Gauge

GP-G Series

GPー2001G

ULVAC

 

General Purpose Type

Pirani Gauge

GP-G Series

GPー2002G

ULVAC

 

General Purpose Type

Pirani Gauge

GP-G Series

GP-1GRY

ULVAC

 

General Purpose Type

Pirani Gauge

GP-G Series

GP-1G

ULVAC

 

General Purpose Type

Pirani Gauge

GP-G Series

GP-1G with case

ULVAC

 

General Purpose Type

Pirani Gauge

GP-G Series

WP-01(Φ18)

ULVAC

 

General Purpose Type

Pirani Gauge

GP-G Series

WP-02(Φ15)

ULVAC

 

General Purpose Type

Pirani Gauge

GP-G Series

WP-03(R3/8)

ULVAC

 

General Purpose Type

Pirani Gauge

GP-G Series

WP-16(NW16)

ULVAC

 

General Purpose Type

Pirani Gauge

GP-G Series

WPB-10-034(ICF034)

ULVAC

 

Ulvac Gas Analyzer(Process Gas Monitor)

  • High Pressure Process
  • Basic Process
  • High Performance Process
  • Reactive Gas Process
  • Software for Gas Analysis

 

High Pressure Process

Qulee CGM2 Series

CGM2-051

ULVAC

 

High Pressure Process

Qulee CGM2 Series

CGM2-052

ULVAC

 

Basic Process

Qulee BGM2 Series

BGM2-101

ULVAC

 

Basic Process

Qulee BGM2 Series

BGM2-201

ULVAC

 

Basic Process

Qulee BGM2 Series

BGM2-102

ULVAC

 

Basic Process

Qulee BGM2 Series

BGM2-202

ULVAC

 

Basic Process

Qulee with YTP-H Series

Qulee with YTP-H BGM2-101

ULVAC

 

Basic Process

Qulee with YTP-H Series

Qulee with YTP-H BGM2-201

ULVAC

 

Basic Process

Qulee with YTP-H Series

Qulee with YTP-H BGM2-102

ULVAC

 

Basic Process

Qulee with YTP-H Series

Qulee with YTP-H BGM2-202

ULVAC

 

High Performance Process

Qulee HGM2 Series

HGM2-202

ULVAC

 

High Performance Process

Qulee HGM2 Series

HGM2-302

ULVAC

 

High Performance Process

Qulee HGM2 Series

Qulee with YTP-H HGM2-302

ULVAC

 

Reactive Gas Process

Qulee RGM2 Series

RGM2-202

ULVAC

 

Reactive Gas Process

Qulee RGM2 Series

RGM2-302

ULVAC

 

Software for Gas Analysis

Software for Gas Analysis

Qulee QCS Ver.4.0

ULVAC

 

 

Ulvac Leak Detector

Stand Alone

Integration Type

 

 

Stand Alone

HELIOT900 Series

HELIOT901W1

ULVAC

 

Stand Alone

HELIOT900 Series

HELIOT904W2

ULVAC

 

Stand Alone

HELIOT900 Series

HELIOT901D2

ULVAC

 

Stand Alone

HELIOT900 Series

HELIOT904D3

ULVAC

 

Stand Alone

HELIOT900 Series

HELIOT904D4

ULVAC

 

Integration Type

HELIOT ZERO

HELIOT ZERO

ULVAC

 

Option

Sniffer Unit Series

AS9

ULVAC

 

Option

Sniffer Unit Series

BS9

ULVAC

 

Option

Sniffer Unit Series

BT9

ULVAC

 

Option

Calibrated Leak(Membrane Type)

CLM-07AY

ULVAC

 

Option

Calibrated Leak(Membrane Type)

CLM-07V

ULVAC

 

Option

Calibrated Leak(Membrane Type)

CLM-08A

ULVAC

 

Option

Calibrated Leak(Membrane Type)

CLM-08C

ULVAC

 

Option

Calibrated Leak(Membrane Type)

CLM-08E

ULVAC

 

Option

Calibrated Leak(Membrane Type)

CLM-08F

ULVAC

 

Option

Calibrated Leak(Membrane Type)

CLM-08V

ULVAC

 

Option

Calibrated Leak(Membrane Type)

CLM-09AZ

ULVAC

 

Option

Calibrated Leak(Membrane Type)

CLM-10A

ULVAC

 

Option

Calibrated Leak(Channel Type)

CLC-04A

ULVAC

 

Option

Calibrated Leak(Channel Type)

CLC-05A

ULVAC

 

Option

Calibrated Leak(Channel Type)

CLC-06A

ULVAC

 

Ulvac High Speed Spectroscopic Ellipsometer

 

UNECS Series

UNECSーPortable

ULVAC

 

Manual Type

UNECS Series

UNECS-1500M

ULVAC

 

Automatic Type

UNECS Series

UNECS-1500A

ULVAC

 

Automatic Type

UNECS Series

UNECS-2000A

ULVAC

 

Automatic Type

UNECS Series

UNECS-3000A

ULVAC

 

Built in Type

UNECS Series

UNECS-1M

ULVAC

 

Standard Sample

100㎚ SIO2/Si

ULVAC

 

Ulvac Deposition Controller

Deposition Controller

Single Sensor

Multi Sensor

Option

 

Option

Quartz Crystal

UCR-5MAG-12

ULVAC

 

Option

Quartz Crystal

UCR-5MAU-12

ULVAC

 

Option

Quartz Crystal

UCR-4MAG-12

ULVAC

 

Deposition Controller

CRTM Series

CRTM-6000G

ULVAC

 

Deposition Controller

CRTM Series

CRTM-9200

ULVAC

 

Single Sensor

CRTS Series

CRTS-0

ULVAC

 

Single Sensor

CRTS Series

CRTS-0 + Cooling Waterjacket

ULVAC

 

Single Sensor

CRTS Series

CRTS-4

ULVAC

 

Single Sensor

CRTS Series

CRTS-6

ULVAC

 

Single Sensor

CRTS Series

CTRS-4U

ULVAC

 

Single Sensor

CRTS Series

CRTS-6U

ULVAC

 

Multi Sensor

CRTS Series

CRTS-M6

ULVAC

 

Multi Sensor

CRTS Series

CRTS-12NS

ULVAC

 

Option

Oscillator and Cable Set

OSC-12BG 4m

ULVAC

 

Option

Oscillator and Cable Set

OSC-12BG 8m

ULVAC

 

Option

Oscillator and Cable Set

OSC-12BG 12m

ULVAC

 

Option

Oscillator and Cable Set

OSC-12BG 16m

ULVAC

 

Option

Oscillator and Cable Set

OSC-12BG 20m

ULVAC

 

Option

Oscillator and Cable Set

OSC-12DG 4m

ULVAC

 

Option

Oscillator and Cable Set

OSC-12DG 8m

ULVAC

 

Option

Oscillator and Cable Set

OSC-12DG 12m

ULVAC

 

Option

Oscillator and Cable Set

OSC-12DG 16m

ULVAC

 

Option

Oscillator and Cable Set

OSC-12DG 20m

ULVAC

 

Ulvac Vacuum Valve

Vacuum Angle Valve

Vacuum Gate Valve

Pendulum Valve

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA020JH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA025JH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA040JH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA050JH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA065JH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA080JH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA100JH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA150JH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA200JH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA250JH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA350JH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA016KF

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA025KF

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA040KF

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA050KF

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA063KC

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA080KC

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA100KC

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA160KC

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA200KC

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA250KC

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB020JH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB025JH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB040JH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB050JH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB065JH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB080JH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB100JH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB150JH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB200JH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB250JH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB016KF

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB025KF

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB040KF

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB050KF

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB063KC

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB080KC

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB100KC

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB160KC

 

 

 

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB200KC

 Angle Valve

Vacuum Gate Valve

Pendulum Valve

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA020JH

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA025JH

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA040JH

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA050JH

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA065JH

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA080JH

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA100JH

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA150JH

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA200JH

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA250JH

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA350JH

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA016KF

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA025KF

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA040KF

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA050KF

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA063KC

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA080KC

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA100KC

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA160KC

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA200KC

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSA250KC

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB020JH

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB025JH

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB040JH

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB050JH

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB065JH

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB080JH

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB100JH

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB150JH

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB200JH

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB250JH

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB016KF

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB025KF

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB040KF

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB050KF

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB063KC

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB080KC

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB100KC

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB160KC

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB200KC

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB250KC

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB016CH

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーSB040CH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーMB016CH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーMB040CH

 

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーMB063CH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーMB100CH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーMB160CH

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーU20

ULVAC

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーU22

ULVAC

 

Vacuum Angle Valve

Double Acting

VLP Series

VLPーU36

ULVAC

 

Vacuum Angle Valve

Single Acting

VLB Series

VLBーSA016KF

 

Vacuum Angle Valve

Single Acting

VLB Series

VLBーSA025KF

 

Vacuum Angle Valve

Single Acting

VLB Series

VLBーSA040KF

 

Vacuum Angle Valve

Single Acting

VLB Series

VLBーSA050KF

 

 

Vacuum Angle Valve

Single Acting

VLB Series

VLBーSB016KF

 

Vacuum Angle Valve

Single Acting

VLB Series

VLBーSB025KF

 

Vacuum Angle Valve

Single Acting

VLB Series

VLBーSB040KF

 

 

Vacuum Angle Valve

Single Acting

VLB Series

VLBーSB050KF

 

Vacuum Angle Valve

Manual Type

VLH Series

VLHーSB020JH

 

 

Vacuum Angle Valve

Manual Type

VLH Series

VLHーSB025JH

 

Vacuum Angle Valve

Manual Type

VLH Series

VLHーSB040JH

 

 

Vacuum Angle Valve

Manual Type

VLH Series

VLHーSB050JH

 

Vacuum Angle Valve

Manual Type

VLH Series

VLHーSB065JH

 

Vacuum Angle Valve

Manual Type

VLH Series

VLHーSB080JH

 

Vacuum Angle Valve

Manual Type

VLH Series

VLHーSB100JH

 

Vacuum Angle Valve

Manual Type

VLH Series

VLHーSB150JH

 

Vacuum Angle Valve

Manual Type

VLH Series

VLHーSB016KF

 

Vacuum Angle Valve

Manual Type

VLH Series

VLHーSB025KF

 

Vacuum Angle Valve

Manual Type

VLH Series

VLHーSB040KF

 

Vacuum Angle Valve

Manual Type

VLH Series

VLHーSB050KF

 

Vacuum Angle Valve

Manual Type

VLH Series

VLHーSB063KC

 

Vacuum Angle Valve

Manual Type

VLH Series

VLHーSB080KC

 

Vacuum Angle Valve

Manual Type

VLH Series

VLHーSB100KC

 

Vacuum Angle Valve

Manual Type

VLH Series

VLHーSB160KC

 

Vacuum Angle Valve

Manual Type

VLH Series

VLHーSB016CH

 

Vacuum Angle Valve

Manual Type

VLH Series

VLHーSB040CH

 

Vacuum Angle Valve

Manual Type

VLH Series

VLHーMB016CH

 

Vacuum Angle Valve

Manual Type

VLH Series

VLHーMB040CH

 

Vacuum Angle Valve

Manual Type

VLH Series

VLHーMB063CH

 

Vacuum Angle Valve

Manual Type

VLH Series

VLHーMB100CH

 

Vacuum Angle Valve

Manual Type

VLH Series

VLHーMB160CH

アルバックテクノ

 

Vacuum Gate Valve

Double Acting

VAP Series

VAPーU100

ULVAC

 

Vacuum Gate Valve

Double Acting

VAP Series

VAPーU150

ULVAC

 

Vacuum Gate Valve

Manual Type

VAH Series

VAHーU100

ULVAC

 

Vacuum Gate Valve

Manual Type

VAH Series

VAHーU150

ULVAC

 

Pendulum Valve

Double Acting

VFR Series

VFR-400

ULVAC

 

Pendulum Valve

Double Acting

VFR Series

VFR-500

ULVAC

 

 

Ulvac DC Power Supply

Small Capacity DC Power Supply

Large Capacity DC Power Supply

Abnormal Discharge Prevention Unit

Bipolar unit for dual cathode

 

DPG Series

DPG-10-AM

ULVAC

 

DPG Series

DPG-10H-AM

ULVAC

 

DPG Series

DPG-10-4AM

ULVAC

 

DPG Series

DPG-20-AM

ULVAC

 

DPG Series

DPG-20H-AM

ULVAC

 

DPG Series

DPG-20-4AM

ULVAC

 

DPG Series

DPG-30H-44E

ULVAC

 

DPG Series

DPG-2

ULVAC

 

DPG Series

DPG-4

ULVAC

 

DCS Series

DCS0052B

ULVAC

 

Abnormal Discharge Prevention Unit

A2K Series

A2KH-25

ULVAC

 

Abnormal Discharge Prevention Unit

A2K Series

A2K-20K

ULVAC

 

Abnormal Discharge Prevention Unit

A2K Series

A2K-40K

ULVAC

 

Bipolar unit for dual cathode

MFU Series

MFU-20K

ULVAC

 

Ulvac DC PULSE Power Supply

DC PULSE Power Supply

 

DPG Series

DPG-10-AM

ULVAC

 

DPG Series

DPG-10H-AM

ULVAC

 

DPG Series

DPG-10-4AM

ULVAC

 

DPG Series

DPG-20-AM

ULVAC

 

DPG Series

DPG-20H-AM

ULVAC

 

DPG Series

DPG-20-4AM

ULVAC

 

DPG Series

DPG-30H-44E

ULVAC

 

DPG Series

DPG-2

ULVAC

 

DPG Series

DPG-4

ULVAC

 

DCS Series

DCS0052B

ULVAC

 

DC PULSE Power Supply

DPG-5P

ULVAC

 

DC PULSE Power Supply

DPG-10P

ULVAC

 

Abnormal Discharge Prevention Unit

A2K Series

A2KH-25

ULVAC

 

Abnormal Discharge Prevention Unit

A2K Series

A2K-20K

ULVAC

 

Abnormal Discharge Prevention Unit

A2K Series

A2K-40K

ULVAC

 

Ulvac MF Power Supply

MF Power Supply

 

DPG Series

DPG-10-AM

ULVAC

 

DPG Series

DPG-10H-AM

ULVAC

 

DPG Series

DPG-10-4AM

ULVAC

 

DPG Series

DPG-20-AM

ULVAC

 

DPG Series

DPG-20H-AM

ULVAC

 

DPG Series

DPG-20-4AM

ULVAC

 

DPG Series

DPG-30H-44E

ULVAC

 

Bipolar unit for dual cathode

MFU Series

MFU-20K

ULVAC

 

Ulvac RF Power Supply

RF Power Supply / Matching box

RF Power Supply Option

 

RF Power Supply / Matching box

RFS-N Series

RFS-1305N

ULVAC

 

RF Power Supply / Matching box

RFS-N Series

RFS-1310N

ULVAC

 

RF Power Supply / Matching box

RFS-N Series

RFS-1330N

ULVAC

 

RF Power Supply / Matching box

RFS-N Series

RFS-1350N

ULVAC

 

RF Power Supply / Matching box

MBX-N Series

MBX-1305N

ULVAC

 

RF Power Supply / Matching box

MBX-N Series

MBX-1310N

ULVAC

 

RF Power Supply / Matching box

MBX-N Series

MBX-1330N

ULVAC

 

RF Power Supply / Matching box

MBX-N Series

MBX-1350N

ULVAC

 

RF Power Supply Option

MEX-N Series

MEX2N-1k

ULVAC

 

RF Power Supply Option

MEX-N Series

MEX2N-3k

ULVAC

 

RF Power Supply Option

MEX-N Series

MEX3N-1k

ULVAC

 

RF Power Supply Option

MEX-N Series

MEX3N-3k

ULVAC

 

RF Power Supply Option

MEX-N Series

MEX4N-1k

ULVAC

 

RF Power Supply Option

MEX-N Series

MEX4N-3k

ULVAC

 

RF Power Supply Option

MEX-N Series

MEX5N-1k

ULVAC

 

RF Power Supply Option

MEX-N Series

MEX5N-3k

ULVAC

 

RF Power Supply Option

MEX-N Series

MEX6N-1k

ULVAC

 

RF Power Supply Option

MEX-N Series

MEX6N-3k

ULVAC

 

RF Power Supply Option

MEX-N Series

MEX7N-1k

ULVAC

 

RF Power Supply Option

MEX-N Series

MEX7N-3k

ULVAC

 

RF Power Supply Option

MEX-N Series

MEX8N-1k

ULVAC

 

RF Power Supply Option

MEX-N Series

MEX8N-3k

ULVAC

 

RF Power Supply Option

EXN Series

EXN2T-40A

ULVAC

 

RF Power Supply Option

EXN Series

EXN3T-40A

ULVAC

 

RF Power Supply Option

EXN Series

EXN4T-40A

ULVAC

 

RF Power Supply Option

EXN Series

EXN2M-40A

ULVAC

 

RF Power Supply Option

EXN Series

EXN3M-40A

ULVAC

 

RF Power Supply Option

EXN Series

EXN4M-40A

ULVAC

 

RF Power Supply Option

EXN Series

EXN2T-70W

ULVAC

 

RF Power Supply Option

EXN Series

EXN3T-70W

ULVAC

 

RF Power Supply Option

EXN Series

EXN4T-70W

ULVAC

 

RF Power Supply Option

EXN Series

EXN2M-70W

ULVAC

 

RF Power Supply Option

EXN Series

EXN3M-70W

ULVAC

 

RF Power Supply Option

EXN Series

EXN4M-70W

ULVAC

 

RF Power Supply Option

PHS-N Series

PHS-04N

ULVAC

 

RF Power Supply Option

PHS-N Series

PHS-08N

ULVAC

 

RF Power Supply Option

EXO Series

EXO-13

ULVAC

 

Ulvac EB Source・EB Power Supply

EB Source for Metal Film

EB Source for Optical Film

EB Power Supply

Option

 

EB Source for Metal Film

EGN Series

EGN-206M

ULVAC

 

EB Source for Metal Film

EGN Series

EGN-406M

ULVAC

 

EB Source for Metal Film

EGL Series

EGL-103S

ULVAC

EB Source for Metal Film

EGL Series

EGL-35

ULVAC

 

EB Source for Metal Film

EGL Series

EGL-35M

ULVAC

 

EB Source for Metal Film

EGL Series

EGL-110

ULVAC

 

EB Source for Metal Film

EGL Series

EGL-80M

ULVAC

 

EB Source for Metal Film

EGK Series

EGKー3

ULVAC

 

EB Source for Metal Film

EGK Series

EGK-3M

ULVAC

 

EB Source for Optical Film

EGO Series

EGO-1G

ULVAC

 

EB Source for Optical Film

EGO Series

EGO-40M

ULVAC

 

EB Power Supply

HPS Series

HPS-510S

ULVAC

 

EB Power Supply

HPS Series

HPS-1000N-100

ULVAC

 

EB Power Supply

HPS Series

HPS-1000N-200

ULVAC

 

EB Power Supply

HPS Series

HPS-1000N-G100

ULVAC

 

EB Power Supply

HPS Series

HPS-1000N-G200

ULVAC

 

EB Power Supply

HPS Series

HPS-1600F-S100

ULVAC

 

EB Power Supply

HPS Series

HPS-1600F-S200

ULVAC

 

EB Power Supply

HPS Series

HPS-1600F-S101

ULVAC

 

Option

High Voltage Introduction Terminal

BERH311A

ULVAC

 

Option

Current Input Terminal

PTS-004

ULVAC

 

Option

Ground Terminal

ERZ-003

ULVAC

 

Option

Atmospheric Pressure Checker

DTA-002

ULVAC

 

Option

Water Cooled Lead in Terminal

DK5203-045

ULVAC

 

 

Ulvac Vacuum Transfer Robot

Vacuum Transfer Robot

Platform

Vacuum Transfer Robot

ELEC/COVOT Series

ELEC-RZ

ULVAC

 

Vacuum Transfer Robot

ELEC/COVOT Series

COVOT-LC

ULVAC

 

Vacuum Transfer Robot

ELEC/COVOT Series

COVOT-6

ULVAC

 

Platform

NCH Series

NCH series

ULVAC

 

 

Ulvac QCM based Molecular Interaction Analyzers

AFFINIX Series

Analysis Software

AFFINIX Series

AFFINIX Q8(QCM2012)

ULVAC

 

AFFINIX Series

AFFINIX QNμ(QCM2008-LVKIT)

ULVAC

 

AFFINIX Series

AFFINIX QN(QCM2008-STKIT)

ULVAC

 

AFFINIX Series

AFFINIX QN Pro(QCM2008-PRKIT)

ULVAC

 

Analysis Software

AQUA

ULVAC

 

Ulvac Precise Microplate Paddle Mixer

MICROPADDLE

 

MICROPADDLE IMP-096A

ULVAC

 

Ulvac Small Film Forming Equipment

Small Evaporation System

Sputtering System

Film Forming Equipment Optional Parts

 

Small Evaporation System

VPC Series

VPC-061

ULVAC KIKO

 

Small Evaporation System

VPC Series

VPC-061A

ULVAC KIKO

 

Small Evaporation System

VPC Series

VPC-260F

ULVAC KIKO

 

Small Evaporation System

VPC Series

VPC-1100

ULVAC KIKO

 

Small Evaporation System

DEPOX Series

VFR-200M/ERH

ULVAC KIKO

 

Small Evaporation System

DEPOX Series

VWR-400M/ERH

ULVAC KIKO

 

Small Evaporation System

DEPOX Series

VTR-350M/ERH

ULVAC KIKO

 

Small Evaporation System

DEPOX Series

VTS-350M/ERH

ULVAC KIKO

 

Small Evaporation System

DEPOX Series

VTR-060M/ERH

ULVAC KIKO

 

Sputtering System

Sputtering System

VTR-151M/SRF

ULVAC KIKO

 

Sputtering System

Sputtering System

RFS-201

ULVAC KIKO

 

Film Forming Equipment Optional Parts

Evaporative Power Supply SEREM Series

PSE Series

ULVAC KIKO

 

Film Forming Equipment Optional Parts

Other

Bell jar cover

ULVAC KIKO

 

Film Forming Equipment Optional Parts

Other

Bell jar holder

ULVAC KIKO

 

Film Forming Equipment Optional Parts

Other

Adhesion shield plate

ULVAC KIKO

 

Film Forming Equipment Optional Parts

Other

Metal bell jar (with water cooling tube)

ULVAC KIKO

 

Film Forming Equipment Optional Parts

Other

Electrode partition

ULVAC KIKO

 

Film Forming Equipment Optional Parts

Other

Substrate heating device 350℃

ULVAC KIKO

 

Ulvac Refrigerator (CRYO)

Cryocoolers

Liquid Nitrogen Generators

Cryocoolers

PDC08

ULVAC CRYOGENICS

 

Cryocoolers

PD016

ULVAC CRYOGENICS

 

Cryocoolers

S030

ULVAC CRYOGENICS

 

Cryocoolers

S050

ULVAC CRYOGENICS

 

Cryocoolers

RM10T

ULVAC CRYOGENICS

 

Cryocoolers

RM20T

ULVAC CRYOGENICS

 

Cryocoolers

RM50T

ULVAC CRYOGENICS

 

Cryocoolers

RM80T

ULVAC CRYOGENICS

 

Cryocoolers

RMS10T

ULVAC CRYOGENICS

 

Cryocoolers

RMS50T

ULVAC CRYOGENICS

 

Cryocoolers

RMS80T

ULVAC CRYOGENICS

 

Cryocoolers

RMS150T

ULVAC CRYOGENICS

 

Cryocoolers

HE05

ULVAC CRYOGENICS

 

Cryocoolers

UHE10

ULVAC CRYOGENICS

 

Cryocoolers

UHE15

ULVAC CRYOGENICS

 

Liquid Nitrogen Generators

EMP-07A

ULVAC CRYOGENICS

 

Liquid Nitrogen Generators

EMP-07W

ULVAC CRYOGENICS

 

Liquid Nitrogen Generators

EMP-14A

ULVAC CRYOGENICS

 

Liquid Nitrogen Generators

EMP-14W

ULVAC CRYOGENICS

 

Liquid Nitrogen Generators

EMP-20W

ULVAC CRYOGENICS

 

Liquid Nitrogen Generators

MP-300K

ULVAC CRYOGENICS

 

Ulvac Heat Treatment And Thermal Properties

Thermoelectric Evaluation System

Thermal Conductivity Measurement System

Multi Property Measurement System

Thermal Analysis Evaluation System

Organic Dye Equipment

Infrared Gold Image Furnace / RTA System

Iron & Steel / Steel Sheet Evaluation System

Nano-particle Deposition System

Surface Science Equipment

Desorption Gas Analyzer

Microbial Activity Measurement System

Handy Welder Series

 

 

Polymeric Thermoelectric Sheet Evaluation System

ZEM-d

ULVAC

 

Thermoelectric Evaluation System

Seebeck Coefficient / Electric Resistance Measurement System

ZEM-3 series

ULVAC

 

Thermoelectric Evaluation System

Seebeck Coefficient / Electric Resistance Measurement System

ZEM-5 series

ULVAC 

 

Thermoelectric Evaluation System

Atmospheric Thermoelectric Module Evaluation System

F-PEM

ULVAC 

 

Thermoelectric Evaluation System

Power Generation Efficiency Characteristics Evaluation System

PEM-2

ULVAC 

 

Thermoelectric Evaluation System

Thermoelectric Conversion Efficiency Evaluation System for Small Modules

Mini-PEM

ULVAC 

 

Thermal Conductivity Measurement System

Laser Flash Method Thermal Constant Measurement System

TC-1200RH/TC-9000 series

ULVAC 

 

Thermal Conductivity Measurement System

Scanning Thermal Probe Micro Image

STPM-1000

ULVAC 

 

Thermal Conductivity Measurement System

Thermal Diffusivity measurement system by Xe flash method

TD-1 series

ULVAC 

 

Thermal Conductivity Measurement System

2-Omega Method Nano Thin Film Thermal Conductivity Meter

TCN-2ω

ULVAC 

 

Thermal Conductivity Measurement System

AC Method Thermal Diffusivity Measurement System

LaserPIT

ULVAC 

 

Multi Property Measurement System

Periodical Heating Method Thermal Diffusivity Measurement System

FTC series

ULVAC 

 

Multi Property Measurement System

Steady Method Thermal Conductivity Measurement System

GH series

ULVAC 

 

Multi Property Measurement System

Rapid Multi Property Measurement System

RMP-1

ULVAC 

 

Multi Property Measurement System

Electric Heat Resistance Measurment System

EHR series

ULVAC 

 

Multi Property Measurement System

Electric Resistance Measurement System for Metals and Semiconductors

TER series

ULVAC

Multi Property Measurement System

Adiabatic Specific Heat Measurement System

SH-3000 series

ULVAC 

 

Thermal Analysis Evaluation System

Thermodilatometer

DL-9000/DLY-9000 series

ULVAC

 

Thermal Analysis Evaluation System

Robotic Thermal Dilatometer

DLY-9000-ROBOT

ULVAC 

 

Thermal Analysis Evaluation System

Thermal Expansion Measurment System by Laser Interferometer

LIX-2 series

ULVAC 

 

Thermal Analysis Evaluation System

Thermomechanical Analyzer

TM-9000 series

ULVAC

 

Thermal Analysis Evaluation System

Thermogravimetry / Differential Thermal Analyzer

TGD-9000 series

ULVAC 

 

Thermal Analysis Evaluation System

Differential Scanning Calorimeter

DSC-R series

ULVAC

 

Organic Dye Equipment

Vapor Pressure Evaluation System

VPE-9000

ULVAC

 

Organic Dye Equipment

Organic Pigment Material Sublimating / Refining System

TRS series

ULVAC

 

Infrared Gold Image Furnace / RTA System

Infrared Gold Image Furnace

RHL-E/VHT/P series

ULVAC

 

Infrared Gold Image Furnace / RTA System

Infrared Gold Image Furnace

Ps,Pss series

ULVAC

 

Infrared Gold Image Furnace / RTA System

Programmable Temperature Controller

TPC-5000 series

ULVAC

 

Infrared Gold Image Furnace / RTA System

Rapid Thermal Annealing System

RTA series

ULVAC 

 

Infrared Gold Image Furnace / RTA System

Variable Atmosphere Lamp Heating System

RTP-6

ULVAC

 

Infrared Gold Image Furnace / RTA System

Mini Lamp Annealer

MILA-5050

ULVAC

 

Infrared Gold Image Furnace / RTA System

Mini Lamp Annealer

MILA-5000 series

ULVAC

 

Infrared Gold Image Furnace / RTA System

Mini Lamp Annealer with air-cooling system

MILA-700AR

ULVAC

 

Infrared Gold Image Furnace / RTA System

Simplified Infrared Lamp Heating System

SSA series

ULVAC

 

Infrared Gold Image Furnace / RTA System

Variable Atmosphere Lamp Heating System

QHC series / VHC series

ULVAC

Infrared Gold Image Furnace / RTA System

Rapid Heating / Water Quenching System

CAS-MR59AQ

ULVAC

 

Infrared Gold Image Furnace / RTA System

High Temperature Rapid Thermal Annealing System

HT-RTA59HD

ULVAC

 

Infrared Gold Image Furnace / RTA System

Production Heat Treatment Furnace

Production Heat Treatment Furnace (Manufacturing Line Equipment)

ULVAC

 

Iron & Steel / Steel Sheet Evaluation System

Continuous Annealing System for Steel Sheet

CAS series

ULVAC

 

Iron & Steel / Steel Sheet Evaluation System

High Temperature Observation System

TMS series

ULVAC

 

Iron & Steel / Steel Sheet Evaluation System

Automatic Transformation Point Measurement System

TransmasterⅢ

ULVA

 

Iron & Steel / Steel Sheet Evaluation System

Micro-Indentation Tester

μIT-1

ULVAC

 

Iron & Steel / Steel Sheet Evaluation System

Lateral Vibration Internal Friction Measurement System

IFT series

ULVAC

Nano-particle Deposition System

 

 

Iron & Steel / Steel Sheet Evaluation System

Micro-Indentation Tester

μIT-1

ULVAC

 

Iron & Steel / Steel Sheet Evaluation System

Lateral Vibration Internal Friction Measurement System

IFT series

ULVAC

 

Nano-particle Deposition System

Arc Plasma Source

APS-1

ULVAC

 

Nano-particle Deposition System

Arc-Plasma method nano-particle Deposition System

APD series

ULVAC

 

Surface Science Equipment

Hight Temperature Wettability Evaluation System by Contact Angle at the Solid-Liquid Interface

WET-1200

ULVAC

 

Surface Science Equipment

Twin-path Surface Force Apparatus

RSM-SFA

ULVAC

 

Surface Science Equipment

Resonance Shear Measurement System

RSM-1

ULVAC

 

Desorption Gas Analyzer

Temperature-Programmed Desorption Gas Analyzer

TDS-M202R

ULVAC

 

Desorption Gas Analyzer

Gas Transmission Rate Measurement System GTms-1

GTms-1 Series

ULVAC

 

Microbial Activity Measurement System

Microbial Activity Measurement System

Antares・Spica・Leonis

ULVAC

 

Handy Welder Series

Handy Spot Welder

HS-9000

ULVAC

 

Handy Welder Series

Handy Arc Welder

HA-1H

ULVAC

 

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