• Screw Type Dry Vacuum Pump

• Multi-Stage Roots Type Dry Vacuum Pump

• Scroll Type Dry Vacuum Pump

• Diaphragm Type Dry Vacuum Pump

• Rocking Piston Type Dry Vacuum Pump

• Oil Rotary Vacuum Pump

• Mechanical Booster Pump

• Vacuum Pumping System

Screw Type Dry Vacuum Pump

LS Series

LS120A

ULVAC

Screw Type Dry Vacuum Pump

LS Series

LS1200A

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR60

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR90

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR180

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR421

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR421-T

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR300

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR600

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR1200

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR1800

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR3601

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR3601-T(TT)

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR3601-R

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR3601-TR(TTR)

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

HR/UR Series

HR60

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

HR/UR Series

HR90

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

HR/UR Series

UR421-T

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

HR/UR Series

HR300

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

HR/UR Series

HR600

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

HR/UR Series

UR600

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

HR/UR Series

HR1200

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

HR/UR Series

UR1200

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

HR/UR Series

UR1800

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

HR/UR Series

UR3601-TT

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

CR Series

CR16B

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

CR Series

CR30B

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

CR Series

CR60B

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

CR Series

CR300B

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

GR Series

GR60A

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

GR Series

GR90A

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

GR Series

GR180A

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

Silencer

RS-01

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

Silencer

RS-02

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

Silencer

RSｰ03

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

Power Saving Attachment

ECO-SHOCK：ES10

ULVAC

Multi-Stage Roots Type Dry Vacuum Pump

Power Saving Attachment

ECO-SHOCK：ES4A

ULVAC

Oil Rotary Vacuum Pump

VD Series

VD151

ULVAC

Oil Rotary Vacuum Pump

VD Series

VD201

ULVAC

Oil Rotary Vacuum Pump

VD Series

VD30C

ULVAC

Oil Rotary Vacuum Pump

VD Series

VD40C

ULVAC

Oil Rotary Vacuum Pump

VD Series

VD60C

ULVAC

Oil Rotary Vacuum Pump

VD Series

VD90C

ULVAC

Oil Rotary Vacuum Pump

VS Series

VS1501

ULVAC

Oil Rotary Vacuum Pump

VS Series

VS2401

ULVAC

Oil Rotary Vacuum Pump

VS Series

VS650A

ULVAC

Oil Rotary Vacuum Pump

VS Series

VS750A

ULVAC

Oil Rotary Vacuum Pump

PVD Series

PVD-180

ULVAC

Oil Rotary Vacuum Pump

PVD Series

PVD-360

ULVAC

Oil Rotary Vacuum Pump

PKS Series

PKS-016

ULVAC

Oil Rotary Vacuum Pump

PKS Series

PKS-030

ULVAC

Oil Rotary Vacuum Pump

PKS Series

PKS-070B

ULVAC

Oil Rotary Vacuum Pump

Oil Mist Trap

TMX-1

ULVAC

Oil Rotary Vacuum Pump

Oil Mist Trap

TM201

ULVAC

Oil Rotary Vacuum Pump

Oil Mist Trap

TM401

ULVAC

Oil Rotary Vacuum Pump

Oil Mist Trap

TM-2

ULVAC

Oil Rotary Vacuum Pump

Oil Mist Trap

TM-2F

ULVAC

Oil Rotary Vacuum Pump

Oil Mist Trap

TM-3

ULVAC

Oil Rotary Vacuum Pump

Oil Mist Trap

TM-3F

ULVAC

Oil Rotary Vacuum Pump

Oil Mist Trap

TM-4

ULVAC

Oil Rotary Vacuum Pump

Oil Mist Trap

TM-4F

ULVAC

Oil Rotary Vacuum Pump

Oil Mist Trap

TM-4S

ULVAC

Oil Rotary Vacuum Pump

ULVOIL Series(OIL)

R-7

ULVAC

Oil Rotary Vacuum Pump

ULVOIL Series(OIL)

R-80

ULVAC

Oil Rotary Vacuum Pump

ULVOIL Series(OIL)

SuperR-7000

ULVAC

Mechanical Booster Pump

PRC Series

PRC-003A

ULVAC

Mechanical Booster Pump

PRC Series

PRC-006A

ULVAC

Mechanical Booster Pump

PRC Series

PRC-012A

ULVAC

Mechanical Booster Pump

PRC Series

PRC-018A

ULVAC

Mechanical Booster Pump

PMBｰD Series

PMB100D

ULVAC

Mechanical Booster Pump

PMBｰD Series

PMB300D

ULVAC

Mechanical Booster Pump

PMBｰD Series

PMB600D

ULVAC

Mechanical Booster Pump

PMBｰD Series

PMB1200D

ULVAC

Mechanical Booster Pump

PMBｰD Series

PMB2400D

ULVAC

Mechanical Booster Pump

PMB-C Series

PMBｰ040C

ULVAC

Mechanical Booster Pump

PMB-C Series

PMB-060C

ULVAC

Vacuum Pumping System

YMV Series

YMV-01A

ULVAC

Vacuum Pumping System

YMV Series

YMV-03A

ULVAC

Vacuum Pumping System

YMV Series

YMV-06A

ULVAC

Vacuum Pumping System

YMV Series

YMV-12A

ULVAC

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 2st Stage Type

DAP-6D

ULVAC KIKO

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 2st Stage Type

DAP-9D-DC24

ULVAC KIKO

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 2st Stage Type

DA-30D

ULVAC KIKO

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 2st Stage Type

DAT-50D

ULVAC KIKO

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 2st Stage Type

DA-20D

ULVAC KIKO

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 2st Stage Type

DA-41D

ULVAC KIKO

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 2st Stage Type

DA-60D

ULVAC KIKO

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 2st Stage Type

DA-121D

ULVAC KIKO

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 1st Stage Type

DAP-12S

ULVAC KIKO

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 1st Stage Type

DAP-18S-DC24

ULVAC KIKO

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 1st Stage Type

DA-60S

ULVAC KIKO

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 1st Stage Type

DAT-100S

ULVAC KIKO

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 1st Stage Type

DA-40S

ULVAC KIKO

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 1st Stage Type

DA-81S

ULVAC KIKO

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 1st Stage Type

DA-120S

ULVAC KIKO

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 1st Stage Type

DA-241S

ULVAC KIKO

Diaphragm Type Dry Vacuum Pump

DAU・MD Series

DAU-20

ULVAC KIKO

Diaphragm Type Dry Vacuum Pump

DTU・MD-C Series

DTU-20

ULVAC KIKO

Diaphragm Type Dry Vacuum Pump

DTC Series

DTC-22

ULVAC KIKO

Diaphragm Type Dry Vacuum Pump

DTC Series

DTC-41

ULVAC KIKO

Diaphragm Type Dry Vacuum Pump

DTC Series

DTC-60

ULVAC KIKO

Rocking Piston Type Dry Vacuum Pump

DOP Series

DOP-40D

ULVAC KIKO

Rocking Piston Type Dry Vacuum Pump

DOP Series

DOP-80S

ULVAC KIKO

Rocking Piston Type Dry Vacuum Pump

DOP Series

DOP-80SP

ULVAC KIKO

Rocking Piston Type Dry Vacuum Pump

DOP Series

DOP-120SY

ULVAC KIKO

Rocking Piston Type Dry Vacuum Pump

DOP Series

DOP-181SA

ULVAC KIKO

Rocking Piston Type Dry Vacuum Pump

DOP Series

DOP-301SB

ULVAC KIKO

Rocking Piston Type Dry Vacuum Pump

DOP Series

DOP-400SB

ULVAC KIKO

Rocking Piston Type Dry Vacuum Pump

DOP Series

DOP-420SA

ULVAC KIKO

Scroll Type Dry Vacuum Pump

DIS・DISL Series

DIS-90

ULVAC KIKO

Scroll Type Dry Vacuum Pump

DIS・DISL Series

DIS-251

ULVAC KIKO

Scroll Type Dry Vacuum Pump

DIS・DISL Series

DIS-501

ULVAC KIKO

Scroll Type Dry Vacuum Pump

DIS・DISL Series

DISL-102

ULVAC KIKO

Scroll Type Dry Vacuum Pump

DIS・DISL Series

DISL-503

ULVAC KIKO

Multi-Stage Roots Type Dry Vacuum Pump

RDA Series

RDA-281H

ULVAC KIKO

Multi-Stage Roots Type Dry Vacuum Pump

RDA Series

RDA-501H

ULVAC KIKO

Oil Rotary Vacuum Pump

GLD・GLS Series

GLD-040

ULVAC KIKO

Oil Rotary Vacuum Pump

GLD・GLS Series

GLD-137AA

ULVAC KIKO

Oil Rotary Vacuum Pump

GLD・GLS Series

GLD-137CC

ULVAC KIKO

Oil Rotary Vacuum Pump

GLD・GLS Series

GLD-202AA

ULVAC KIKO

Oil Rotary Vacuum Pump

GLD・GLS Series

GLD-202BB

ULVAC KIKO

Oil Rotary Vacuum Pump

GLD・GLS Series

GLD-280A

ULVAC KIKO

Oil Rotary Vacuum Pump

GHD Series

GHD-031A

ULVAC KIKO

Oil Rotary Vacuum Pump

GHD Series

GHD-101A

ULVAC KIKO

Oil Rotary Vacuum Pump

GCD Series

GCD-051X

ULVAC KIKO

Oil Rotary Vacuum Pump

GCD Series

GCD-136X

ULVAC KIKO

Oil Rotary Vacuum Pump

GCD Series

GCD-201X

ULVAC KIKO

Oil Rotary Vacuum Pump

ULVOIL Series(OIL)

R-2

ULVAC KIKO

Oil Rotary Vacuum Pump

SMR Series(OIL)

SMR-100

ULVAC KIKO

Oil Rotary Vacuum Pump

SO-M Series(OIL)

SO-M

ULVAC KIKO

MBS Series

MBS-053

ULVAC KIKO

Vacuum Pumping System

VM Series

VMR-050

ULVAC KIKO

Scroll Type Dry Vacuum Pump

SGT Series

SGT-100

ULVAC KIKO

Scroll Type Dry Vacuum Pump

SGT Series

SGT-200

ULVAC KIKO

Oil Rotary Vacuum Pump

Oil Mist Trap

OMT-050A

ULVAC KIKO

Oil Rotary Vacuum Pump

Oil Mist Trap

OMT-100A

ULVAC KIKO

Oil Rotary Vacuum Pump

Oil Mist Trap

OMT-200A

ULVAC KIKO

Oil Rotary Vacuum Pump

Inline Trap

OMI-100

ULVAC KIKO

Oil Rotary Vacuum Pump

Inline Trap

OMI-200

ULVAC KIKO

Oil Rotary Vacuum Pump

Oil Mist Trap Adapter

G3/4male×G1

ULVAC KIKO

Oil Rotary Vacuum Pump

Oil Mist Separator

OMC-050

ULVAC KIKO

Oil Rotary Vacuum Pump

Oil Mist Separator

OMC-200

ULVAC KIKO

Oil Rotary Vacuum Pump

Fore Line Trap

OFI-050C

ULVAC KIKO

Oil Rotary Vacuum Pump

Fore Line Trap

OFI-200C

ULVAC KIKO

Oil Rotary Vacuum Pump

Fore Line Trap

OFI-050V

ULVAC KIKO

Oil Rotary Vacuum Pump

Fore Line Trap

OFI-200V

ULVAC KIKO

Oil Rotary Vacuum Pump

Hose Port Suction Pipe

O.D.Φ8×M20

ULVAC KIKO

Oil Rotary Vacuum Pump

Hose Port Suction Pipe

O.D.Φ12×M20

ULVAC KIKO

Oil Rotary Vacuum Pump

Hose Port Suction Pipe

O.D.Φ15×M20

ULVAC KIKO

Oil Rotary Vacuum Pump

Hose Port Suction Pipe

O.D.Φ18×M20

ULVAC KIKO

Oil Rotary Vacuum Pump

Hose Port Suction Pipe

O.D.Φ22×M20

ULVAC KIKO

Oil Rotary Vacuum Pump

Hose Port Suction Pipe

O.D.Φ27×□40

ULVAC KIKO

Oil Rotary Vacuum Pump

Hose Port Suction Pipe

O.D.Φ27×□50

ULVAC KIKO

Oil Rotary Vacuum Pump

Hose Port Suction Pipe

O.D.Φ12　(GHD-031A)

ULVAC KIKO

Oil Rotary Vacuum Pump

Hose Port Suction Pipe

O.D.Φ18　(GHD-031A)

ULVAC KIKO

Oil Rotary Vacuum Pump

KF-25 Suction Pipe

KF-25×M20

ULVAC KIKO

Oil Rotary Vacuum Pump

KF-25 Suction Pipe

KF-25×□40

ULVAC KIKO

Oil Rotary Vacuum Pump

KF-25 Suction Pipe

KF-25×□50

ULVAC KIKO

Oil Rotary Vacuum Pump

R screw types Suction Pipe

A-type suction pipe (R1/4-L20 Male × M20)

ULVAC KIKO

Oil Rotary Vacuum Pump

R screw types Suction Pipe

B-type suction pipe (R1/4 Female × M20)

ULVAC KIKO

Oil Rotary Vacuum Pump

R screw types Suction Pipe

C-type suction pipe (R1/4-L10 Male × M20)

ULVAC KIKO

Oil Rotary Vacuum Pump

Adapter

40mm sq Adapter (M20 Female)

ULVAC KIKO

Oil Rotary Vacuum Pump

Adapter

50mm sq Adapter (M20 Female)

ULVAC KIKO

Oil Rotary Vacuum Pump

Adapter

KF25 suction pipe(KF25×M20 Female)

ULVAC KIKO

Oil Rotary Vacuum Pump

Hose Port Exhaust Pipe

Φ15×G3/4

ULVAC KIKO

Oil Rotary Vacuum Pump

Hose Port Exhaust Pipe

Φ18×G3/4

ULVAC KIKO

Oil Rotary Vacuum Pump

Hose Port Exhaust Pipe

Φ27×G1

ULVAC KIKO

Oil Rotary Vacuum Pump

KF-16 Exhaust Pipe

KF-16×G3/4

ULVAC KIKO

Oil Rotary Vacuum Pump

KF-25 exhaust pipe

KF-25×G3/4

ULVAC KIKO

Oil Rotary Vacuum Pump

KF-25 exhaust pipe

KF-25×G1

ULVAC KIKO

• Cryo Pump
• Super Trap
• Turbo Molecular Pump
• Ion Pump
• Oil Diffusion Ejector Pump
• Vacuum Pumping System

• Transducer Type
• General Purpose Type

Transducer Type

Pirani Vacuum Gauge

Smartphone-Direct Pirani Gauge

SWU10-U

ULVAC

Transducer Type

Multi Ionization Gauge

SH2 Series

SH2-1

ULVAC

Transducer Type

Multi Ionization Gauge

SH2 Series

SH2-2

ULVAC

Transducer Type

Multi Ionization Gauge

SH2 Series

M-34(NW16)

ULVAC

Transducer Type

Multi Ionization Gauge

SH2 Series

M-35(NW25)

ULVAC

Transducer Type

Multi Ionization Gauge

SH2 Series

M-36(ICF070)

ULVAC

Transducer Type

Multi Ionization Gauge

ST2 Series

ST2-1

ULVAC

Transducer Type

Multi Ionization Gauge

ST2 Series

ST2-2

ULVAC

Transducer Type

Multi Ionization Gauge

ST2 Series

SWT-16(NW16)

ULVAC

Transducer Type

Multi Ionization Gauge

ST2 Series

SWT-25(NW25)

ULVAC

Transducer Type

Pressure Sensor Unit

SAU

SAU

ULVAC

Transducer Type

Ceramic Capacitance Manometer

CCMT-D Series

CCMT-1000D

ULVAC

Transducer Type

Ceramic Capacitance Manometer

CCMT-D Series

CCMT-100D

ULVAC

Transducer Type

Ceramic Capacitance Manometer

CCMT-D Series

CCMT-10D

ULVAC

Transducer Type

Ceramic Capacitance Manometer

CCMT-D Series

CCMT-1D

ULVAC

Transducer Type

Ceramic Capacitance Manometer

Display Series_Ceramic Capacitance Manometer

GM-2001

ULVAC

Transducer Type

Ceramic Capacitance Manometer

Display Series_Ceramic Capacitance Manometer

GM-2002

ULVAC

Transducer Type

Atmosphere Pirani Gauge

SW1

SW1-1

ULVAC

Transducer Type

Atmosphere Pirani Gauge

SW1

SW1-2

ULVAC

Transducer Type

Atmosphere Pirani Gauge

SW1

SWP-16(NW16)

ULVAC

Transducer Type

Atmosphere Pirani Gauge

SW1

SWP-25(NW25)

ULVAC

Transducer Type

Atmosphere Pirani Gauge

SW1

SWP-P18(Φ18)

ULVAC

Transducer Type

Atmosphere Pirani Gauge

SW1

SWP-P15(Φ15)

ULVAC

Transducer Type

Atmosphere Pirani Gauge

SW1

SWP-CF16(ICF034)

ULVAC

Transducer Type

Atmosphere Pirani Gauge

SW1

SWP-R1/8(R1/8)

ULVAC

Transducer Type

Pirani Vacuum Gauge

SP1

SP1

ULVAC

Transducer Type

Pirani Vacuum Gauge

SP1

WP-01(Φ18)

ULVAC

Transducer Type

Pirani Vacuum Gauge

SP1

WP-02(Φ15)

ULVAC

Transducer Type

Pirani Vacuum Gauge

SP1

WP-03(R3/8)

ULVAC

Transducer Type

Pirani Vacuum Gauge

SP1

WP-16(NW16)

ULVAC

Transducer Type

Cold Cathode Ionization Gauge

SC1

SC1

ULVAC

Transducer Type

Cold Cathode Ionization Gauge

SC1

C-21(Φ18/15)

ULVAC

Transducer Type

Cold Cathode Ionization Gauge

SC1

C-23(ICF034)

ULVAC

Transducer Type

Cold Cathode Ionization Gauge

SC1

C-24(NW16)

ULVAC

Transducer Type

Cold Cathode Ionization Gauge

SC1

C-25(NW25)

ULVAC

Transducer Type

Display Unit

Display Series_Display Unit

ISG1

ULVAC

Transducer Type

Display Unit

Display Series_Display Unit

IM1R1

ULVAC

Transducer Type

Display Unit

Display Series_Display Unit

IM2R1

ULVAC

General Purpose Type

Extremely High Vacuum Gauge

AxTRAN Series

AxTRAN

ULVAC

General Purpose Type

Extremely High Vacuum Gauge

AxTRAN Series

X-11(ICF070)

ULVAC

General Purpose Type

Ionization Gauge

GI Series

GI-M2

ULVAC

General Purpose Type

Ionization Gauge

GI Series

M-11(Φ18)

ULVAC

General Purpose Type

Ionization Gauge

GI Series

M-12(Φ15)

ULVAC

General Purpose Type

Ionization Gauge

GI Series

M-13(ICF034)

ULVAC

General Purpose Type

Ionization Gauge

GI Series

M-14(NW16)

ULVAC

General Purpose Type

Ionization Gauge

GI Series

M-15(NW25)

ULVAC

General Purpose Type

Ionization Gauge

GI Series

GI-D7(WIT)

ULVAC

General Purpose Type

Ionization Gauge

GI Series

WIT-G1(Φ18/15)

ULVAC

General Purpose Type

Ionization Gauge

GI Series

WIT-G8(Φ18/15)

ULVAC

General Purpose Type

Ionization Gauge

GI Series

GI-D7(WIB)

ULVAC

General Purpose Type

Ionization Gauge

GI Series

WIB-G5(Φ18/15)

ULVAC

General Purpose Type

Ionization Gauge

GI Series

WIB-N3(ICF070)

ULVAC

General Purpose Type

Pirani Gauge

GP-G Series

GPｰ1000G

ULVAC

General Purpose Type

Pirani Gauge

GP-G Series

GPｰ2001G

ULVAC

General Purpose Type

Pirani Gauge

GP-G Series

GPｰ2002G

ULVAC

General Purpose Type

Pirani Gauge

GP-G Series

GP-1GRY

ULVAC

General Purpose Type

Pirani Gauge

GP-G Series

GP-1G

ULVAC

General Purpose Type

Pirani Gauge

GP-G Series

GP-1G with case

ULVAC

General Purpose Type

Pirani Gauge

GP-G Series

WP-01(Φ18)

ULVAC

General Purpose Type

Pirani Gauge

GP-G Series

WP-02(Φ15)

ULVAC

General Purpose Type

Pirani Gauge

GP-G Series

WP-03(R3/8)

ULVAC

• High Pressure Process
• Basic Process
• High Performance Process
• Reactive Gas Process
• Software for Gas Analysis

High Pressure Process

Qulee CGM2 Series

CGM2-051

ULVAC

Stand Alone

HELIOT900 Series

HELIOT901W1

ULVAC

Stand Alone

HELIOT900 Series

HELIOT904W2

ULVAC

Stand Alone

HELIOT900 Series

HELIOT901D2

ULVAC

Stand Alone

HELIOT900 Series

HELIOT904D3

ULVAC

Stand Alone

HELIOT900 Series

HELIOT904D4

ULVAC

Integration Type

HELIOT ZERO

HELIOT ZERO

ULVAC

Option

Sniffer Unit Series

AS9

ULVAC

Option

Sniffer Unit Series

BS9

ULVAC

Option

Sniffer Unit Series

BT9

ULVAC

Option

Calibrated Leak（Membrane Type）

CLM-07AY

ULVAC

Option

Calibrated Leak（Membrane Type）

CLM-07V

ULVAC

Option

Calibrated Leak（Membrane Type）

CLM-08A

ULVAC

Option

Calibrated Leak（Membrane Type）

CLM-08C

ULVAC

Option

Calibrated Leak（Membrane Type）

CLM-08E

ULVAC

Option

Calibrated Leak（Membrane Type）

CLM-08F

ULVAC

Option

Calibrated Leak（Membrane Type）

CLM-08V

ULVAC

Option

Calibrated Leak（Membrane Type）

CLM-09AZ

ULVAC

Option

Calibrated Leak（Membrane Type）

CLM-10A

ULVAC

Option

Calibrated Leak（Channel Type）

CLC-04A

ULVAC

Option

Calibrated Leak（Channel Type）

CLC-05A

ULVAC

Option

Calibrated Leak（Channel Type）

CLC-06A

ULVAC

UNECS Series

UNECSｰPortable

ULVAC

Manual Type

UNECS Series

UNECS-1500M

ULVAC

Automatic Type

UNECS Series

UNECS-1500A

ULVAC

Automatic Type

UNECS Series

UNECS-2000A

ULVAC

Automatic Type

UNECS Series

UNECS-3000A

ULVAC

Built in Type

UNECS Series

UNECS-1M

ULVAC

Standard Sample

100㎚ SIO2/Si

ULVAC

Deposition Controller

Single Sensor

Multi Sensor

Option

Option

Quartz Crystal

UCR-5MAU-12

ULVAC

Option

Quartz Crystal

UCR-4MAG-12

ULVAC

Deposition Controller

CRTM Series

CRTM-6000G

ULVAC

Deposition Controller

CRTM Series

CRTM-9200

ULVAC

Single Sensor

CRTS Series

CRTS-0

ULVAC

Single Sensor

CRTS Series

CRTS-0 + Cooling Waterjacket

ULVAC

Single Sensor

CRTS Series

CRTS-4

ULVAC

Single Sensor

CRTS Series

CRTS-6

ULVAC

Single Sensor

CRTS Series

CTRS-4U

ULVAC

Single Sensor

CRTS Series

CRTS-6U

ULVAC

Multi Sensor

CRTS Series

CRTS-M6

ULVAC

Multi Sensor

CRTS Series

CRTS-12NS

ULVAC

Option

Oscillator and Cable Set

OSC-12BG　4m

ULVAC

Option

Oscillator and Cable Set

OSC-12BG　8m

ULVAC

Option

Oscillator and Cable Set

OSC-12BG　12m

ULVAC

Option

Oscillator and Cable Set

OSC-12BG　16m

ULVAC

Option

Oscillator and Cable Set

OSC-12BG　20m

ULVAC

Option

Oscillator and Cable Set

OSC-12DG　4m

ULVAC

Option

Oscillator and Cable Set

OSC-12DG　8m

ULVAC

Option

Oscillator and Cable Set

OSC-12DG　12m

ULVAC

Option

Oscillator and Cable Set

OSC-12DG　16m

ULVAC

Option

Oscillator and Cable Set

OSC-12DG　20m

ULVAC

Double Acting

VLP Series

VLPｰU20

ULVAC

Vacuum Angle Valve

Double Acting

VLP Series

VLPｰU22

ULVAC

Vacuum Angle Valve

Double Acting

VLP Series

VLPｰU36

ULVAC

Vacuum Angle Valve

Manual Type

VLH Series

VLHｰMB160CH

アルバックテクノ

Vacuum Gate Valve

Double Acting

VAP Series

VAPｰU100

ULVAC

Vacuum Gate Valve

Double Acting

VAP Series

VAPｰU150

ULVAC

Vacuum Gate Valve

Manual Type

VAH Series

VAHｰU100

ULVAC

Vacuum Gate Valve

Manual Type

VAH Series

VAHｰU150

ULVAC

Pendulum Valve

Double Acting

VFR Series

VFR-400

ULVAC

Pendulum Valve

Double Acting

VFR Series

VFR-500

ULVAC

Small Capacity DC Power Supply

Large Capacity DC Power Supply

Abnormal Discharge Prevention Unit

Bipolar unit for dual cathode

DPG Series

DPG-10-AM

ULVAC

DC PULSE Power Supply

DPG-10-AM

ULVAC

DPG Series

DPG-10H-AM

ULVAC

DPG Series

DPG-10-4AM

ULVAC

DPG Series

DPG-20-AM

ULVAC

DPG Series

DPG-20H-AM

ULVAC

DPG Series

DPG-20-4AM

ULVAC

DPG Series

DPG-30H-44E

ULVAC

DPG Series

DPG-2

ULVAC

DPG Series

DPG-4

ULVAC

DCS Series

DCS0052B

ULVAC

DC PULSE Power Supply

DPG-5P

ULVAC

DC PULSE Power Supply

DPG-10P

ULVAC

Abnormal Discharge Prevention Unit

A2K Series

A2KH-25

ULVAC

Abnormal Discharge Prevention Unit

A2K Series

A2K-20K

ULVAC

Abnormal Discharge Prevention Unit

A2K Series

A2K-40K

ULVAC

MF Power Supply

DPG-10-AM

ULVAC

DPG Series

DPG-10H-AM

ULVAC

DPG Series

DPG-10-4AM

ULVAC

DPG Series

DPG-20-AM

ULVAC

DPG Series

DPG-20H-AM

ULVAC

DPG Series

DPG-20-4AM

ULVAC

DPG Series

DPG-30H-44E

ULVAC

Bipolar unit for dual cathode

MFU Series

MFU-20K

ULVAC

RF Power Supply / Matching box

RFS-N Series

RFS-1305N

ULVAC

RF Power Supply / Matching box

RFS-N Series

RFS-1310N

ULVAC

RF Power Supply / Matching box

RFS-N Series

RFS-1330N

ULVAC

RF Power Supply / Matching box

RFS-N Series

RFS-1350N

ULVAC

RF Power Supply / Matching box

MBX-N Series

MBX-1305N

ULVAC

RF Power Supply / Matching box

MBX-N Series

MBX-1310N

ULVAC

RF Power Supply / Matching box

MBX-N Series

MBX-1330N

ULVAC

RF Power Supply / Matching box

MBX-N Series

MBX-1350N

ULVAC

RF Power Supply Option

MEX-N Series

MEX2N-1k

ULVAC

RF Power Supply Option

MEX-N Series

MEX2N-3k

ULVAC

RF Power Supply Option

MEX-N Series

MEX3N-1k

ULVAC

RF Power Supply Option

MEX-N Series

MEX3N-3k

ULVAC

RF Power Supply Option

MEX-N Series

MEX4N-1k

ULVAC

RF Power Supply Option

MEX-N Series

MEX4N-3k

ULVAC

RF Power Supply Option

MEX-N Series

MEX5N-1k

ULVAC

RF Power Supply Option

MEX-N Series

MEX5N-3k

ULVAC

RF Power Supply Option

MEX-N Series

MEX6N-1k

ULVAC

RF Power Supply Option

MEX-N Series

MEX6N-3k

ULVAC

RF Power Supply Option

MEX-N Series

MEX7N-1k

ULVAC

RF Power Supply Option

MEX-N Series

MEX7N-3k

ULVAC

RF Power Supply Option

MEX-N Series

MEX8N-1k

ULVAC

RF Power Supply Option

MEX-N Series

MEX8N-3k

ULVAC

RF Power Supply Option

EXN Series

EXN2T-40A

ULVAC

RF Power Supply Option

EXN Series

EXN3T-40A

ULVAC

RF Power Supply Option

EXN Series

EXN4T-40A

ULVAC

RF Power Supply Option

EXN Series

EXN2M-40A

ULVAC

RF Power Supply Option

EXN Series

EXN3M-40A

ULVAC

RF Power Supply Option

EXN Series

EXN4M-40A

ULVAC

RF Power Supply Option

EXN Series

EXN2T-70W

ULVAC

RF Power Supply Option

EXN Series

EXN3T-70W

ULVAC

RF Power Supply Option

EXN Series

EXN4T-70W

ULVAC

RF Power Supply Option

EXN Series

EXN2M-70W

ULVAC

RF Power Supply Option

EXN Series

EXN3M-70W

ULVAC

RF Power Supply Option

EXN Series

EXN4M-70W

ULVAC

RF Power Supply Option

PHS-N Series

PHS-04N

ULVAC

RF Power Supply Option

PHS-N Series

PHS-08N

ULVAC

RF Power Supply Option

EXO Series

EXO-13

ULVAC

EB Source for Metal Film

EB Source for Optical Film

EB Power Supply

Option

EGN Series

EGN-206M

ULVAC

EB Source for Metal Film

EGN Series

EGN-406M

ULVAC

EB Source for Metal Film

EGL Series

EGL-103S

ULVAC

EB Source for Metal Film

EGL Series

EGL-35

ULVAC

EB Source for Metal Film

EGL Series

EGL-35M

ULVAC

EB Source for Metal Film

EGL Series

EGL-110

ULVAC

EB Source for Metal Film

EGL Series

EGL-80M

ULVAC

EB Source for Metal Film

EGK Series

EGKｰ3

ULVAC

EB Source for Metal Film

EGK Series

EGK-3M

ULVAC

EB Source for Optical Film

EGO Series

EGO-1G

ULVAC

EB Source for Optical Film

EGO Series

EGO-40M

ULVAC

EB Power Supply

HPS Series

HPS-510S

ULVAC

EB Power Supply

HPS Series

HPS-1000N-100

ULVAC

EB Power Supply

HPS Series

HPS-1000N-200

ULVAC

EB Power Supply

HPS Series

HPS-1000N-G100

ULVAC

EB Power Supply

HPS Series

HPS-1000N-G200

ULVAC

EB Power Supply

HPS Series

HPS-1600F-S100

ULVAC

EB Power Supply

HPS Series

HPS-1600F-S200

ULVAC

EB Power Supply

HPS Series

HPS-1600F-S101

ULVAC

Option

High Voltage Introduction Terminal

BERH311A

ULVAC

Option

Current Input Terminal

PTS-004

ULVAC

Option

Ground Terminal

ERZ-003

ULVAC

Option

Atmospheric Pressure Checker

DTA-002

ULVAC

Option

Water Cooled Lead in Terminal

DK5203-045

ULVAC

Vacuum Transfer Robot

Platform

Vacuum Transfer Robot

ELEC/COVOT Series

ELEC-RZ

ULVAC

Vacuum Transfer Robot

ELEC/COVOT Series

COVOT-LC

ULVAC

Vacuum Transfer Robot

ELEC/COVOT Series

COVOT-6

ULVAC

Platform

NCH Series

NCH series

ULVAC

AFFINIX Series

Analysis Software

AFFINIX Series

AFFINIX Q8(QCM2012)

ULVAC

AFFINIX Series

AFFINIX QNμ(QCM2008-LVKIT)

ULVAC

AFFINIX Series

AFFINIX QN(QCM2008-STKIT)

ULVAC

AFFINIX Series

AFFINIX QN Pro(QCM2008-PRKIT)

ULVAC

Analysis Software

AQUA

ULVAC

MICROPADDLE

Small Evaporation System

Sputtering System

Film Forming Equipment Optional Parts

Small Evaporation System

VPC Series

VPC-061

ULVAC KIKO

Small Evaporation System

VPC Series

VPC-061A

ULVAC KIKO

Small Evaporation System

VPC Series

VPC-260F

ULVAC KIKO

Small Evaporation System

VPC Series

VPC-1100

ULVAC KIKO

Small Evaporation System

DEPOX Series

VFR-200M/ERH

ULVAC KIKO

Small Evaporation System

DEPOX Series

VWR-400M/ERH

ULVAC KIKO

Small Evaporation System

DEPOX Series

VTR-350M/ERH

ULVAC KIKO

Small Evaporation System

DEPOX Series

VTS-350M/ERH

ULVAC KIKO

Small Evaporation System

DEPOX Series

VTR-060M/ERH

ULVAC KIKO

Sputtering System

Sputtering System

VTR-151M/SRF

ULVAC KIKO

Sputtering System

Sputtering System

RFS-201

ULVAC KIKO

Film Forming Equipment Optional Parts

Evaporative Power Supply SEREM Series

PSE Series

ULVAC KIKO

Film Forming Equipment Optional Parts

Other

Bell jar cover

ULVAC KIKO

Film Forming Equipment Optional Parts

Other

Bell jar holder

ULVAC KIKO

Film Forming Equipment Optional Parts

Other

Adhesion shield plate

ULVAC KIKO

Film Forming Equipment Optional Parts

Other

Metal bell jar (with water cooling tube)

ULVAC KIKO

Film Forming Equipment Optional Parts

Other

Electrode partition

ULVAC KIKO

Film Forming Equipment Optional Parts

Other

Substrate heating device 350℃

ULVAC KIKO

Cryocoolers

Liquid Nitrogen Generators

Cryocoolers

PDC08

ULVAC CRYOGENICS

Cryocoolers

PD016

ULVAC CRYOGENICS

Cryocoolers

S030

ULVAC CRYOGENICS

Cryocoolers

S050

ULVAC CRYOGENICS

Cryocoolers

RM10T

ULVAC CRYOGENICS

Cryocoolers

RM20T

ULVAC CRYOGENICS

Cryocoolers

RM50T

ULVAC CRYOGENICS

Cryocoolers

RM80T

ULVAC CRYOGENICS

Cryocoolers

RMS10T

ULVAC CRYOGENICS

Cryocoolers

RMS50T

ULVAC CRYOGENICS

Cryocoolers

RMS80T

ULVAC CRYOGENICS

Cryocoolers

RMS150T

ULVAC CRYOGENICS

Cryocoolers

HE05

ULVAC CRYOGENICS

Cryocoolers

UHE10

ULVAC CRYOGENICS

Cryocoolers

UHE15

ULVAC CRYOGENICS

Liquid Nitrogen Generators

EMP-07A

ULVAC CRYOGENICS

Liquid Nitrogen Generators

EMP-07W

ULVAC CRYOGENICS

Liquid Nitrogen Generators

EMP-14A

ULVAC CRYOGENICS

Liquid Nitrogen Generators

EMP-14W

ULVAC CRYOGENICS

Liquid Nitrogen Generators

EMP-20W

ULVAC CRYOGENICS

Liquid Nitrogen Generators

MP-300K

ULVAC CRYOGENICS

Thermoelectric Evaluation System

Thermal Conductivity Measurement System

Multi Property Measurement System

Thermal Analysis Evaluation System

Organic Dye Equipment

Infrared Gold Image Furnace / RTA System

Iron & Steel / Steel Sheet Evaluation System

Nano-particle Deposition System

Surface Science Equipment

Desorption Gas Analyzer

Microbial Activity Measurement System

Handy Welder Series

Iron & Steel / Steel Sheet Evaluation System

Micro-Indentation Tester

μIT-1

ULVAC

Iron & Steel / Steel Sheet Evaluation System

Lateral Vibration Internal Friction Measurement System

IFT series

ULVAC

Nano-particle Deposition System